Study of Ar ion milling / SEM analysis on uncoated shale samples
WANG Liang;ZHANG Xiong-dong;LIU Yu-xia;Research Institute of Petroleum Exploration and Development,East China Company,SINOPEC;
Two methods including coating and uncoating are compared in SEM( scanning electron microscopy) analysis of shale samples polished by argon ion beam. The result shows that coating process can reduce charging phenomena remarkably,while images with uncoating way can provide more real information about shale,especially the micropores structure in nano-scale. After optimizing the analysis conditions,including acceleration voltage,detectors,scanning speed,clear SEM images of polished shale samples with less charge can be obtained in uncoating way. Meanwhile,the uncoating way can be used in shale analysis more widely,such as FIB-SEM that can analyze 3- dimension structure of micropores.