Integrated system of imaging,micro-manipulation and fabrication based on environmental scanning electron microscopy
AO Zhuo;CHEN Pei-pei;YIN Bo-hua;XIE Jia-yi;SUN Quan-mei;QI Ruo-mei;HAN Li;HAN Dong;National Center for Nanoscience and Technology;Institute of Electrical Engineering,Chinese Academy of Sciences;Beijing Hospital,Ministry of Health;
Environmental scanning electron microscopy( ESEM) is made from regular SEM with addition techniques for imaging nonconductive samples at water vapor atmosphere. Based on the ESEM,we developed an integrated system for imaging,characterizing,micromanipulation and electron beam lithography,which introduced the traditional medical method into the micro \ nano-scale. It provides practical tools for biological and medical researches in the mesoscope. Herein we made a detailed introduction and introduced a few samples in the applications of medicine,material,micro force measurement and micro fabrications.