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Maintenance and Improvement of GL-69 Type Ion Beam Thinner

Xiong Weihao Hu Zhenhua Cui Kun(Huazhong University of Science and Technology,Wuhan 430074)  
In the paper, some improving methods and comments concerning vacuum determination,high voltage and argon current control system,ion beam tilt angle of the sample stage etc. of the GL-69 type in thinner have been proposed.Meanwhile the relationship curve between ion beam current and time has bean determind,pro-viding reference for the technician using ion beam thinner.
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