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《Journal of Fudan University(Natural Science)》 2007-01
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Growth and Characterization of Undoped Polycrystalline ZnO Films

WANG Yun-tao,ZHANG Xin,GU Xiao-bao,WU Xiao-jing(Department of Materials Science,Fudan University,Shanghai 200433,China)  
A series of undoped ZnO polycrystalline films were grown on Si substrates by thermal decomposition method with Zn (CH3COO)2·2H2O as source at different substrate temperatures.The films prepared were characterized by XRD,SEM,PL and Hall Effect measurement.The XRD results revealed wurtzite type structure of the ZnO films.However,splitting of diffraction peak was observed at high angle,indicating the structure of the films is not uniform.The PL spectra of the film showed strong emission in the blue light band.Hall measurement revealed p-type of the films at lower deposition temperature(480 ℃),while at higher temperature(≥480 ℃),it changes into n-type.SEM measurements showed the dependence of the film morphology on the substrate temperature.Base on these results,the technology and mechanism about thermal decomposition method are analyzed.
【CateGory Index】: O484.4
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【Citations】
Chinese Journal Full-text Database 3 Hits
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【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 HONG Wei-ming(Zhanjiang Normal College,Zhanjiang 524048,CHN);Preparation and Characteristics of ZnO∶Al Thin Films Prepared by Sol-gel Technique[J];Semiconductor Optoelectronics;2007-03
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3 CHEN Aijun~ 1,3 ,WU Xuemei~ 1,3 ,ZHUGE Lanjian~ 2,3 (1 Department of Physics, Soochow University,Suzhou 215006;2 Analysis and Testing Center, Soochow University,Suzhou 215006; 3 Jiangsu Key Laboratory of Thin Film,Suzhou 215006);Development of Photoelectricity and Magnetisim Properties of ZnO Thin Film[J];Materials Review;2006-S1
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1 Xue Shuwen Liu Yanzhang Zu Xiaotao (Department of Applied Physics, University of Electronic Sciences Technology of China, Chengdu 610054);Effects of Low Doping Concentration on the Properties of ZnO:Al Films[A];[C];2006
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