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《Chinese Journal of Luminescence》 2017-09
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Strong Tunable Light Emission from Amorphous Silicon Oxycarbide Film

WANG Huai-pei;LIN Zhen-xu;SONG Jie;ZHANG Wen-xing;WANG Yan;GUO Yan-qing;LI Hong-liang;SONG Chao;HUANG Rui;College of Physics and Optoelectronics,Taiyuan University of Technology;School of Materials Science and Engineering,Hanshan Normal University;  
The strong luminescent amorphous silicon oxycarbide(a-SiC_xO_y) films with different O content were prepared by very high frequency plasma enhanced chemical vapor deposition( VHFPECVD) at 250 ℃ by using the gas mixture of SiH_4,CH_4 and O_2as the precursor. The effect of O content on the luminescent properties and structure of SiC_xO_y thin films was investigated. It is found that the increase of O content results in remarkable photoluminescence( PL) with orange-red to blue shifting emission,which can be clearly observed with the naked eyes in a bright room. The PL of the a-SiC_xO_y film is suggested from the nanoseconds recombination lifetime. The microstructure and the chemical compositions of the films were further investigated by Raman spectra,X-ray photoelectron spectroscopy( XPS) and Fourier transform infrared absorption( FTIR) spectroscopy,respectively.Combining with the PL results and the analysis of the chemical bonds and microstructure present in the films,the main phase structure of the films and the change of the luminescent center with the O_2 flow rate are the main reasons for the tunable light emission.
【Fund】: 国家自然科学基金(61274140 61306003);; 广东省自然科学基金(2015A030313871);; 广东高校优秀青年创新人才培养计划项目(YQ2015112);; 广东省普通高校青年创新人才项目(自然科学)2016资助项目~~
【CateGory Index】: O484
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