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《Powder Metallurgy Technology》 2004-06
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P-type CuAlO_2 semiconductor ceramic material prepared by sintering

Zhao Daqing, Yao Wei (Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China)  
Ceramic target material with good performance is a prerequisite for film preparation by sputtering. Using Al 2O 3(nanosize) and Cu 2O(micron size) powders as raw material, a P-type transparent conducting oxide ceramic material,CuAlO 2, was prepared by sintering in Ar atmosphere. The effect of sintering temperature on the reaction was investigated by means of XRD and SEM. A P-type semicoductor material with good performance was obtained by sintering at appropriate temperature range with mobility being 27cm 2·V -1·s -1.Taking the semiconductor material as a target, a P-type transparent semiconductor film was obtained by vacuum magnetron spuffering with mobility being 2.1 cm 2·V -1·s -1.
【CateGory Index】: TN304
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