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Study on Excitation Temperatures of a Novel Microwave Plasma Enhanced Glow Discharge Source

Li Yimu; DU Zhaohui; Zhang Hanqi; Duan Yixiang; Jin Qinhan (Department of Chemistry, Jilin University, Changchun 130023 ) Liu Hongshi (Scientific Instrumental Factory of Jilin University)  
The excitation temperatures of a novel microwave plasma enhanced glow discharge (MPEGD) source were evaluated. Iron was selected as the thermometric species because its emission lines have desirable characteristics for excitation temperature measurement. The slope and two-line methods were used to calculate the Texc. The results showed that the Text of MPEGD is obviously higher than that of GD.
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