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《Opto-electronic Engineering》 1993-05
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Application of Acousto-Optic Tunable Filter to Measuring the Optical Thickness of Thin Films

Li Junjie, Wang Yong(Institute of Optics & Electronics, Chinese Academy of Sciences, Chengdu, 610209)  
In this paper, the principle of measurement of the optical thickness of thin films is researched and demonstrated experimentally using a visible acousto-optic tunable filter.
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