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《Opto-electronic Engineering》 2001-01
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Laser Scanning On Line Inspection System for Ball Grid Array Coplanarity Measurement

XUE Xiao jie, SUN Chang ku, YE Sheng hua (State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,China)  
A laser scanning on line inspection system used for BGA (Ball Grid Array ) coplanarity measurement is introduced. The dynamic errors in scanning are corrected at real time. A coplanarity evaluation method based on three point method is proposed. The corresponding experimental investigations are carried out and satisfactory results are achieved.
【Fund】: 国家自然科学基金资助项目 !(6990 60 0 1
【CateGory Index】: TN247
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