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《Opto-electronic Engineering》 2001-01
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Design of a Nano Measurement Control System Based on Dual Fabry Perot Interferometer

CHEN Ben yong 1, ZHU Ruo gu 2, WU Zhao tong 1 (1.Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027,China; 2. Department of Metrology & Measurement, China Institute of Metrology, Hangzhou 310034,China)  
A novel nano measurement system based on dual Fabry Perot interferometer is designed and a mathematical model for various links of the system is described.In accordance with the characteristics that the mathematical model for the mutual action between probe and sample surface is complicated,a control system based on fuzzy control theory is designed.Some theoretical basis and practical measurement method for carrying out nano measurement through control curve central line of probe vibration is proposed.Simulation experiments for the system are carried out on this basis.The experimental results fully demonstrate the correctness of system and theoretical basis.
【Fund】: 国家自然科学基金资助项目 !(597750 87)
【CateGory Index】: TH744
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Chinese Journal Full-text Database 1 Hits
1 CHEN Ben-yong1, WU Xiao-wei1, LI Da-cheng21.Department of measurement and control technology, Zhejiang University of Sciences, Hangzhou 310033, China; 2. Department of precision instruments, Tsinghua University, Beijing 100084, China;A Novel Software Interference Fringe-Counting Method and its Realization[J];Journal of Transcluction Technology;2004-03
Chinese Journal Full-text Database 2 Hits
1 Zhang Yiyi; He Jie; Shang Guangyi;Yao Junen(Beijing Laboratory of Electron Microscopy,Academia Sinica,Beijing100080);An Atomic Force Microscope[J];ACTA OPTICA SINICA;1995-01
2 Chen Benyong (Dept.of Mechanical Engineering,Zhejiang Univesity,Hangzhou 310027) Zhu Ruogu (Dept.of Metrology & Control,China Institute of Metrology,Hangzhou 310034) Wu Zhaotong (Dept.of Mechanical Engineering,Zhejiang University,Hangzhou 310027);Theoretical Analysis of Nanometre Measurement System with Dual Fabry-Perot Interferometer[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;2000-04
Chinese Journal Full-text Database 5 Hits
1 WEN Fang, ZHU Sheng-xiang, LI Rui (Pohl Institute of Solid Physics, Tongji University, Shanghai 200092, China);Fabrication and characterization of a new optical fiber probe for atomic force microscopy[J];Optical Technology;2002-05
2 YANG Jintao XU Wendong (Optical Storage Laboratory, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800);Various Configurations of Scanning Probe Microscopes (SPMs)[J];Laser & Optronics Progress;2005-06
3 Chen Benyong 1 Wu Zhaotong 1 Zhu Ruogu 2 ( 1Department of Mechanical Engineering,Zhejiang University,Hangzhou 310027)( 2Department of Metrology & Measurement Control,China Institute of Metrology,Hangzhou 310034);Researches and developments of nanon measurement technique[J];LASER JOURNAL;2000-02
4 ZHANG Yan, ZHANG Rong-zhu, DONG Jun, ZHANG Jun, CAI Bang-wei (Opto-electronics Science and Technology Department, Sichuan University, Chengdu 610064,China);Digital knife-edge testing technology on micro-optical surface characterization[J];High Power Laser & Particle Beams;2004-02
5 Chen Benyong1 Li Dacheng2 1 (Center of Nanotechnology, Zhejiang Sci-Tech University, Hangzhou 310018,China) 2 (State Key Lab of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084,China);Challenges and Opportunities of Nanomeasurement Technology[J];Chinese Journal of Scientific Instrument;2005-05
Chinese Journal Full-text Database 10 Hits
1 ZHANG Quan-fa,GUO Mao-tian,YANG Hai-bin,HE Jin-tian (School of Physical Engineering,Zhengzhou University,Zhengzhou 450052,China);Measurement of the Refractive Index for Liquid Using CCD[J];SEMICONDUCTOR OPTOELECTRONICS;2000-03
2 ZHANG Li-ying, FAN Xiu-feng, FU Xue-yi (Technical Center of Baotou Steel (Group) Corporation, Baotou 014010, China);Effect of thermocouple welding way on accuracy of temperature measurement[J];Science & Technology of Baotou Steel(Group) Corporation;2003-04
3 Wang Tingyun Sun Yunhe Zheng Shengxuan(Harbin Institute of Technology) (Yansan University);An Optical Fiber Current Sensor Utilizing Faber-Perot Interferometer[J];Journal of Transcluction Technology;1997-03
4 Lu Qizhu Zheng Shengxuan Zhang Keqin (Yanshan University, Qinhuangdao 066004, CHN);Study of Acoustic Emission Sensor with Optical Fiber Fabry-Perot Interference[J];JOURNAL OF TRANSCLUCTION TECHNOLOGY;1999-01
5 CHEN Ben-yong1, WU Xiao-wei1, LI Da-cheng21.Department of measurement and control technology, Zhejiang University of Sciences, Hangzhou 310033, China; 2. Department of precision instruments, Tsinghua University, Beijing 100084, China;A Novel Software Interference Fringe-Counting Method and its Realization[J];Journal of Transcluction Technology;2004-03
6 WANG Gui-fu, CHEN Gui-lin, CHEN Yu-liang (Shanghai Institute of Technical Physics,Chinese Academy of Sciences, Shanghai 200083,China);An angle measurement technology besed on laser interferometer[J];Journal of Transducer Technology;2001-01
7 CAO Man-ting (Coll. of Elec. Engin., Yanshan University, Qinhuangdao 066004,China);Study on Fabry-Perot interference optic fiber temperature sensor[J];Journal of Transducer Technology;2001-07
8 LING Zhenbao, WANG Jun, ZHU Kaiguang, ZHUANG Ruipeng (Coll of Elct Sci and Engin,Jilin University,Ch angchun 130026,China);Application of a digital temperature sensor in the cold terminal compensation of thermocouple[J];Journal of Transducer Technology;2003-06
9 GE Yi-bing, HUA Shi-qun (Faculty of Sci,Jiangsu University, Zhenjiang 212013,China);Measuring refractive index of liquid with linear array CCD[J];Journal of Transducer Technology;2003-09
10 GUO Shao-peng, WU Lan-jun, LIU Hong (Institute of Electrical Engineering,Chinese Academy of Sciences, Beijing 100080,China);Design of multipoint temperature measurement and control system by platinum resistor[J];Journal of Transducer Technology;2004-01
China Proceedings of conference Full-text Database 1 Hits
1 Zhao Qingliang DongShen (Precision Engineering Research Institute, Harbin Institute of Technology, P.O.Box 413, 150001);STUDY ON NANO-MACHINING UTILIZING AN ATOMIC FORCE MICROSCOPE[A];[C];2000
【Secondary References】
Chinese Journal Full-text Database 4 Hits
1 LI Hong~(1,2),FENG Chang-you~1,DING Lin-hui~11.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China;Dynamic Evaluation Method for Interpolation Errors in Photoelectric Encoder[J];Journal of Transcluction Technology;2005-04
2 MU Rui-zhen,YANG Wan-fu,CHEN Ben-yong(Nanometer Measurement Lab,Zhejiang Sci-Tech University,Hangzhou 310018,China);A novel interference fringe integral-counting software method and its realization[J];Optical Technique;2008-05
3 ZHOU Zhao-bing ZHANG Yang Wang S (College of Wood Science and Technology,Nanjing Forestry University,Nanjing 210037,China Tennessee Forest Products Center, The University of Tennessee, Knoxville TN37996-4570, USA);Nanoindentation Testing Technique of Wood and Wood-based Composite Materials Based on AFM[J];China Forest Products Industry;2008-02
4 AO Tian-yong,XIANG Bing (School of Physics and Electronics,Henan University,Kaifeng 475001,China);The Design of a Novel Fringe Counter for Michelson Interferometer[J];Journal of Zhengzhou University(Engineering Science);2008-01
【Secondary Citations】
Chinese Journal Full-text Database 3 Hits
1 Yao Junen;Shang Guangyi;Jiao Yuekan;Yi Yuan;He Jie;Zhong Jichang;Rong Deyian Beijing Laboratory of Electron Microscopy, Academia Sinica Bai Chunli Institute of Chemisry, Academia Sinica Scientific Instrument Institute Academia Sinica;An Atomic Resolution Scanning Tunneling Microscope[J];Journal of Chinese Electron Microscopy Society;1988-01
2 Zhu Ruogu(China Institute of Metrology, Hangzhou 310034);Experimental Research on Sinusodial Phase Modulating Double F-P Interferometry[J];ACTA OPTICA SINICA;1994-05
3 Zhu Ruogu (Hangzhou School of Metrology);A new configuration for the measurement of micro-displace-ment-double passive plano-concave Fabry-Perot interferometer[J];Laser Journal;1985-02
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