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《Opto-electronic Engineering》 2001-01
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Design of a Nano Measurement Control System Based on Dual Fabry Perot Interferometer

CHEN Ben yong 1, ZHU Ruo gu 2, WU Zhao tong 1 (1.Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027,China; 2. Department of Metrology & Measurement, China Institute of Metrology, Hangzhou 310034,China)  
A novel nano measurement system based on dual Fabry Perot interferometer is designed and a mathematical model for various links of the system is described.In accordance with the characteristics that the mathematical model for the mutual action between probe and sample surface is complicated,a control system based on fuzzy control theory is designed.Some theoretical basis and practical measurement method for carrying out nano measurement through control curve central line of probe vibration is proposed.Simulation experiments for the system are carried out on this basis.The experimental results fully demonstrate the correctness of system and theoretical basis.
【Fund】: 国家自然科学基金资助项目 !(597750 87)
【CateGory Index】: TH744
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