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《Opto-Electronic Engineering》 2007-03
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Method of measuring roundness error based on slit diffraction

HUA Shi-qun,LUO Ying,ZHAO Guo-qi(Faculty of Science,Jiangsu University,Zhenjiang 212013,China)  
A new optical method for automatic measurement of roundness error was presented based on the diffraction principle of a slit.In measurement system,the slit width was changed with the workpiece roundness error,so the distances of diffraction fringes were altered.In order to compute the width of the center bright stripe according to the accurate position of diffraction dark fringes,the least square method was used to fit quadratic curves of the intensity distribution.With the least square method,the roundness error could be evaluated by the relationship between workpiece roundness error and the width of the center bright stripe.The measuring result proves the feasibility of the new method.The relative uncertainty of the workpiece roundness error is less than 1.4%.The measuring system is easy to operate and has high measuring accuracy.This method can be applied to measure the cone angle error and the alignment error,etc.
【CateGory Index】: TG83
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