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《Opto-Electronic Engineering》 2007-12
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Polarization-light triangulation tracking probe

ZHAO Min,QIU Zong-ming,GUO Yan-zhen,LIU Hong-zhao ( School of Mechanical Instrumental Engineering, Xi’an University of Technology, Xi’an 710048, China )  
A polarization-light triangulation tracking probe is designed to overcome the shortcoming of triangulation measurement. The theoretical analyses of triangulation method prove that measurement precision can be improved by reducing measurement range. The proposed method combines surface tracing method with triangulation method. Measurement range is limitless by tracking. Measurement precision is improved greatly by triangulation measurement only in small range. Analyzing and deriving the reflection property of metal surface, different polarization properties between mirror reflection and diffuse reflection are obtained. Polarization-light filtering is used to reduce the bad effect of mirror reflection light on measurement, so as to lower the material characteristic demand of measured surface. The structure and the working principle of the probe are described in this paper. It is proved that the probe can measure metal surface of high mirror reflection. In the experiment, the probe can track surface automatically and take high precision measurement of surface shape with telemeter.
【CateGory Index】: TP274
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