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《Opto-Electronic Engineering》 2010-07
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Nanosecond Laser Damage and Modification on Diamond-like Carbon Films

TANG Duo-chang,LI Xiao-hong,YUAN Chun-hua,YANG Hong-dao,LI Guo-qiang (Laboratory of Matter Characteristic Research under Extreme Conditions;Laser and Photoelectron Laboratory,School of Science,Southwest University of Science and Technology,Mianyang 621010,Sichuan Province,China)  
Diamond-like Carbon(DLC) films prepared by electron beam evaporation deposition were irradiated with a Nd:YAG pulsed laser,operating at different wavelengths(λ=355 nm,532 nm,1064 nm).Different methods including optical microscope,optical profiler and Raman spectrometer were employed for analyzing the films.The results show that the damage threshold energy density for DLC film flashed by a single laser pulse of different wavelengths is different,and the damage threshold for DLC film flashed by the multipulses laser of same wavelengths is lower.DLC films are modified after laser irradiation.The profile of the irradiated surface shows swelling and crater,resulting from superposition of three laser-induced processes-graphitization,spallation and evaporation.Swelling height and crater depth were determined by laser energy density and the number of laser pulses.
【Fund】: 四川省教育厅青年基金(08zb006);; 西南科技大学博士研究基金(06zx7113)
【CateGory Index】: O484.1
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 XU Jun-qi1,2,FAN Hui-qing1,LIU Wei-guo2,SU Jun-hong2(1.State Key Laboratory of Solidification Processing,School of Materials Science and Engineering,Northwestern Polytechnical University,Xi'an 710072,China;2.School of Opto-electronic Engineering,Xi'an Technological University,Xi'an 710032,China);Laser Damage Properties and Process Optimization of Diamond-like Carbon Thin Films[J];Opto-Electronic Engineering;2008-12
【Secondary Citations】
Chinese Journal Full-text Database 2 Hits
1 LIU Qiang, LIN Li-bin, JIANG Xiao-dong, HUANG Zu-xing, GAN Rong-bing , TANG Fang-yuan Department of Physics, Sichuan University , Chengdu, Sichuan 610064, China; National Key Laboratory of Laser Fusion , CAEP, Mianyang, Sichuan 621900, China);Study on Improving Damage Threshold of Dielectric Films[J];Chinese Journal of Lasers;2003-07
2 Xu Junqi,Su Junhong,Xie Songlin and Liang Haifeng(School of Optoelectronic Engineering,Xi'an Technological University,Xi'an 710032,China);Laser Damages and Two Diamond-Like Carbon Growth Techniques[J];Chinese Journal of Vacuum Science and Technology;2007-03
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