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Design of a Laser Heterodyne Interferometer for 2 D Nanometer Scale Measurement

Chen Xiaomei, Cao Hang, Zhou Zili, Qi Aihui (Changcheng Institute of Metrology and Measurement,Beijing,100095)  
The design of a 2 D laser heterodyne interferometer with 2nm uncertainty and 0.5nm resolution within 50μm measuring range is proposed in the paper.The acousto optic modulator and frequency stabilizing He Ne laser will be used to obtain an orthogonal polarized frequency laser beam with less than 200 kHz frequency difference.Both polarization interferometers at X and Y axes are differential interferometer.Phase demodulation technology will be used for heterodyne interference signal processing.
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