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The Testing Method for Image Quality of Photolithographic Lens

Zhou Mingbao, Du Chunlei, Lin Dajian, Guo Yong (State Key Laboratory of Optical Technology of Microfabrication,Institute of Optics & Electronics, Chinese Academy of Sciences,Chengdu,610209)  
A new technique for measuring the position of ultraviolet or deep ultraviolet spot is proposed in the paper.A new method for testing the image quality of the photolithographic lens is formed by the combination of the new technique and the conventional Hartmann testing.This method has the advantages ofsimple measuring principle and the high measuring accuracy.Under the laboratory environment which has no the measures of vibration isolation and constant temperature.the measuring accuracy of the transverse aberration is -1.2 ̄+1.1μm and repeated measuring accuracy is:-1.7μm 3 σ 1.7μm.
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