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《High Voltage Engineering》 2009-01
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A Microwave Plasma System with Ring Waveguide

FENG Jian1,2,ZHANG Gui-xin1,LIU Liang3,WANG Shu-min1,ZHANG Qing1(1.Department of Electrical Engineering,Tsinghua University,Beijing 100084,China;2.Shijiazhuang Electric Power Company,Hebei Province,Shijiazhuang 050021,China;3.North China Electric Power Academy of Sciences,Beijing 100045,China)  
The research on plasma devices under higher pressure has not been developed deeply.We introduces a new microwave plasma generator,which can excite plasma by the function of slot antennae and an extra slot on the inwall of the ring waveguide around the cavity.This structure with two different kinds of slot can expand the area of high electric field,benefiting the production of large area plasma.Moreover,an air-blast ionization jet is supported to help reduce the microwave power input on plasma exciting by the effect of ionization stream.We present the structure and design of the generator,compare the generator with common narrow slots antenna cavity to show the advantages,and show the function of ionization jet by analyzing the change of the power input with or without the ionization stream.Through the appearance observed by the camera,homogenous plasma with large area can be produced at one atmospheric pressure.
【Fund】: 国家自然科学基金(50477005)~~
【CateGory Index】: TN136
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【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 WANG Shu-min1,ZHANG Gui-xin1,XIE Yun-fei1,FENG Jian1,2 ZHANG Qing1(1.Department of Electrical Engineering,Tsinghua University,Beijing 100084,China;2.Shijiazhuang Electric Power Company,Hebei Province,Shijiazhuang 050021,China);Sterilization of Escherichia Coli with Two Atmospheric Pressure Plasmas[J];High Voltage Engineering;2009-01
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