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《Journal of Optoelectronics·Laser》 2018-06
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Four-direction least-square phase unwrapping algorithm based on shearing interferometry and second derivative of quality weight

LI Qin;LIU Wei;WANG Dao-dang;KONG Ming;GUO Tian-tai;ZHAO Jun;CHEN Zheng-xia;College of Metrology and Measurement Engineering,China Jiliang University;Section of Design Technology,Changzhou Hydraulic Complete Equipment Factory Co.,Ltd.;  
In order to reduce the impacts of the phase that changes too fast and the noise on the reconstruction of the phase in the optical interferometry,a four-direction least-square phase unwrapping algorithm based on shearing interferometry and the second derivative of quality weight is proposed.The algorithm introduces the quality weight that can check the data quality and the lateral shearing interferometry,and applies them to the four direction least-square phase unwrapping algorithm.The algorithm can not only improve the under-sampling caused by the phase transition,but also improve the stability of the algorithm.Then,according to the relationship between discrete gradient and phase error,an improved four-direction least-square phase unwrapping algorithm based on shearing interferometry and the second derivative of quality weight is proposed.By comparing the simulation results of the improved algorithm and the four-direction least-square phase unwrapping algorithm based on shearing interferometry,it can be clearly found that the former is closer to the ideal value.Besides,the average error of the former is only half of that of the latter.The algorithm is applied to digital holographic 3 Dsurface reconstruction technology,which can achieve better accuracy than micron level measurement.Through this method,the depth error of the step sample is 0.012μm.
【Fund】: 国家自然科学基金(51375467);; 浙江省自然科学基金(LY17E050014);; 国家质量监督检验检疫总局公益性行业科研专项(201310116);国家质量监督检验检疫总局科技计划(2017QK033)资助项目
【CateGory Index】: O436.1
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