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《Physics and Engineering》 2018-05
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SIMULATION INVESTIGATION ON THE INFLUENCE OF LOAD COIL POWER AND SAMPLING CONE APERTURE ON THE CHARACTERISTICS OF ICP ION SOURCE

QUAN Jun;SUN Mengtao;Department of Physics,Lingnan Normal University;School of Mathematics and Physics,University of Science and Technology of Beijing;  
Basing on three tube nested axis symmetric mainstream inductively coupled plasma(ICP)torch tube model,we study the effects of load coil power and sampler orifice diameter on gas temperature and flow field of ICP.Results show that:1)Increase of the load coil power can raise gas temperature of core area of inductively coupled plasma when the load coil power is lower than threshold power,but the load coil power can hardly have an impact on gas temperature of plasma center channel when it is higher than the threshold power.2)Sampler orifice with enlarged diameter will make it harder to transfer the load coil power to center channel.If load coil power is a little higher,the length of center channel with gas temperature higher than 6000 K will be contracted,but if not,the gas temperature before sampler orifice will drop down obviously.Otherwise,larger orifice diameter is supposed to be very useful for the analysis of elements,whose ions are easy to diffuse.3)Both extremely low load coil power and enlarged orifice diameter can cause infinitesimal disturbance on the interface between injector central gas and auxiliary gas.Appropriately improved load coil power can efficiently eliminate the disturbance.This work can help optimize the working parameters of ICP and provide theoretical references for the design of new ICP interface device of ion source.
【Fund】: 国家自然科学基金(11304276 91436102和11374353)资助;; 广东省自然科学基金(2017A030313022);; 大学物理教学团队(114961700249)
【CateGory Index】: O657.63
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