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SURFACE-ENHANCED CANTILEVER SENSORS WITH NANO-POROUS FILMS

Huiling Duan(State Key Laboratory for Turbulence and Complex System,CAPT and Department of Mechanics and Aerospace Engineering,College of Engineering,Peking University,Beijing 100871,China)  
Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest.In this paper,the design of surface-enhanced cantilever sensors using nano(micro-) porous films as surface layers is proposed.The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain,the surface stress and the adsorption mass are analyzed.It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity,the size of the pores and the structure of the porous films.For the three kinds of cantilever consisting of solid films,films with aligned cylindrical micro-scale pores,and those with nano-scale pores,the nano-porous one has the highest static and dynamic sensitivities,whereas the solid one has the lowest.
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