Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《固体力学学报(英文版)》 2017-03
Add to Favorite Get Latest Update

An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

Feng Zhu;Yuxing Zhang;Bin Wang;Zhenghua Qian;State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics;  
Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator(FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model(often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR.
【Fund】: supported by the National Natural Science Foundation of China (Nos. 11502108 11232007 51405225);; the Natural Science Foundation of Jiangsu Province (Nos. BK20140037 BK20140808);; the Fundamental Research Funds for Central Universities (No. NE2013101);; the Program for New Century Excellent Talents in Universities (No. NCET-12-0625);; a project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)
【CateGory Index】: TN65
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved