Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Materials for Mechanical Engineering》 2013-10
Add to Favorite Get Latest Update

Effects of Deposition Temperature and Ar Pressure on Phase Structure and Properties of Ti Films

GAO Xiao-ming;SUN Jia-yi;HU Ming;WENG Li-jun;FU Yan-long;YANG Jun;TAN Hong-gen;Shanghai Key Laboratory of Spacecraft Mechanisms;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences;  
Ti films were deposited at low temperature(166K)and room temperature(300K)under different Ar pressures of 0.2-0.8Pa by arc ion plating(AIP).The phase structure and properties of the Ti films were studied using X-ray diffraction(XRD),atomic force microscope(AFM),microhardness tester and scratch tester. The results show that the Ti films deposited at various deposition conditions had a two-phase nanocomposite structure of hexagonal closed-packed(hcp)ω-Ti andα-Ti phases,and showed an increase in the relative content ofω phase with decreasing deposition temperature and Ar pressure.Thus the Ti films,deposited at lower temperature and Ar pressure,presented a higher microhardness because theωphase is a hard brittle phase,and a better adhesion with steel substrate.Therefore,the Ti films deposited at lower temperature and Ar pressure were feasible for interlayers between solid lubricating films and steel substrates to improve their adhesion and load carrying capacity.
【Fund】: 国家自然科学基金资助项目(50301015 21173243)
【CateGory Index】: TB383.2
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 5 Hits
1 GAO Xiao-ming~(1,2) SUN Jia-yi~1 HU Ming~1 WENG Li-jun~1 LIU Wei-min~1 (1.Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;2.Graduate School of Chinese Academy of Sciences,Beijing 100039,China);Effects of Substrate Temperature and Film Thickness on Structure and Tribological Properties of Ag Films Prepared by Ion Plating[J];Materials for Mechanical Engineering;2007-07
2 LIU Yi-bo1,2,XU Feng2,YAO Lei2,XIN Bin-nan2,WANG Cheng-quan2,SHAN Ai-dang1,SONG Hong-wei2(1.School of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China;2.Baosteel Research Institute,Baoshan Iron & Steel Co.,Ltd.,Shanghai 201900,China;3.Shanghai Baogang Group Special Steel Branch Company,Shanghai 200940,China);In-Situ Observation of β→α Phase Transformation of TA2 Commercial Pure Titanium during Continuous Cooling[J];Materials for Mechanical Engineering;2011-01
3 Zhu Zhishou; Gu Jialin; Chen Nanping (Tsinghua University, Beijing 100084,PRC)Yang Zhaoshu (Baoji Nonferrous Metals Works,Baoji Shanxi 721014,PRC);Research on the Relationship Between Texture and Mechanical Property Anisotropy in Commercially Pure Titanium Sheets[J];MATERIALS FOR MECHANICAL ENGINEERING;1994-02
4 GAO Xiao-ming1,2,SUN Jia-yi1,HU Ming1,WENG Li-jun1,LIU Wei-min1(1.State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China;2.Graduate School of Chinese Academy of Sciences,Beijing 100039,China);Crystal Structure and Friction and Wear Properties of Cu Films Deposited at Low Temperatures by Ion Plating[J];Tribology;2007-04
5 LI Shi-kai,YU Wei,LIAO Zhi-qian,YAN Fei-hao,WANG Mei-jiao (Luoyang Ship Material Research Institute,Luoyang 471003,China);Effects of ω phase on properties of Ti10V2Fe3Al alloy[J];The Chinese Journal of Nonferrous Metals;2010-S1
Chinese Journal Full-text Database 10 Hits
1 WU Gui-fang, SONG Xue-ping, LIU Yong, LIN Wei, SUN Zhao-qi (Department of Physics, Anhui University, Hefei230039,China);Effects of substrate temperature on the stress properties of sputtering Cu film on Si wafer[J];Journal of Anhui University(Natural Sciences);2004-03
2 ZHOU Jian,LAI Jun-rong(Department of Mechanical Engineering,Guangxi University of Technology,Liuzhou 545006,China);Indium-methyl-ethyl-diketone manufacturing[J];Journal of Anhui University(Natural Sciences);2006-06
3 CHEN Pu-sheng1, ZHANG Hao2, FENG Wen-xiu1, LIU Jian1,LIU Xiao-yang3, WANG Feng4(1. Dept. of Appl. Phys.,South China Univ. of Tech.,Guangzhou, 510640;2. No.5 Institute of the Ministry of theInformation Industry,Guangzhou, 510610;3. Dept. of Mechanical Engi;Analysis of Auger electron spectrum and infrared absorption spectra of the SiO_xN_y thin dielectric film formed by low temperature PECVD[J];Semiconductor Technology;2002-07
4 Jin Chengganga,c,Wu Xuemeia,c,Zhuge Lanjianb,c(a.Department of Physics;b.Analysis and Testing Center;c.Jiangsu Key Laboratory of Thin Film,Soochow University,Suzhou 215006,China);Recent Development of SiC-Based Diluted Magnetic Semiconductors Materials[J];Micronanoelectronic Technology;2007-12
5 Tian Minbo (Department of Materials Science and Engineering, Tsinghua University, Beijing 100084)Isao Yamada (Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606-01, Japan);Irradiation Effects of CO_2 Cluster Ion Beam on Surface of Si Substrate[J];CHINESE JOURNAL OF SEMICONDUCTORS;1997-04
6 Ji Yuan ;Li Ying ;Zhong Taoxing ( School of Materials Science and Engineering, Beijing Polytechnic University, 100022 ) Li Zhiguo ;Cheng Yaohai ;Sun Yinghua; Guo Weiling ;Zhu Hong ( Department of Electronic Engineering, Beijing Polytechnic University, 1;The Effect of SiO2 Dielectric Passivation on the Grain Growth of Al-Cu Film[J];JOURNAL OF BEIJING POLYTECHNIC UNIVERSITY;1998-01
7 XIE Guangming; LI Jinxu; GAO Hansan; YIN Wanli ( Beijing Solar Energy Research Institute, Beijing 100083, China Material Science and Engineering School, UST Beijing, Beijing 100083, China);Study Interference Effect Al-N-O Solar Selective Surface[J];JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING;2000-01
8 Hai-tao Jiang, Ji-xiong Liu, Zhen-li Mi, Ai-min Zhao, and Yan-jun Bi Metallurgical Engineering Research Institute, University of Science and Technology Beijing, Beijing 100083, China;Texture evolution of commercial pure Ti during cold rolling and recrystallization annealing[J];矿物冶金与材料学报(英文版);2012-06
9 OU Yi, SUN Yu nan, CUI Fang, CUI Jian min (Dept. of Optical Engineering, Beijing Institute of Technology, Beijing100081, China);Finite Element Analysis of the Structure and Electric Fields for a Micromachined Fabry-Perot Cavity on Silicon[J];Journal of Beijing Institute of Technology;2002-04
10 WANG Xiao-li,JIAO Qing-jie,LI Guo-xin Beijing Institute of Technology, Beijing 100081, China);Mechanism of Evaporating PETN Explosive Film[J];Journal of Beijing Institute of Technology;2004-03
China Proceedings of conference Full-text Database 10 Hits
1 HU Ming,GAO Xiaoming,SUN Jiayi,WENG Lijun,FU Yanlong,YANG Jun,WANG Xiaoping (State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou,730000);Structure and Mechanical Properties of Ti Films Deposited at Low Temperature by Arc Ion Plating[A];[C];2011
2 Wang Hai-dou~1 Xu Bin-shi~1 Liu Jia-jun~2 Kang Jia-jie~(1,3) Zhu Li-na~(1,3) (1.Academy of Armored Forces Engineering National Key Lab for Remanufacturing,Beijing 100072; 2.Tsinghua University,Department of Mechanical Engineering,Beijing,100084; 3.Hebei University of Technology,Department of Materials Science and Engineering,Tianjin,300130);Study on characterization and tribological properties of solid lubrication MoS_2 film prepared by chemical reaction[A];[C];2008
3 Xia Zhangneng Xu Jie~+ (The 23rd Research Institute,Ministry of Electronics Industry,Shanghai,200437,China) (+ Department of Materials Science and Engineering,Nanjing University of Chemical Technology,Nanjing,210009,China);Mechanisms of Metallization of Aluminum Nitride Ceramics by Electroless Plating[A];[C];1998
4 Wang Jihui He Xiaoming Lu Xinchun Wen Shizhu (State Key Laboratory of Tribology,Tsinghua University,Beijing,100084,China);Structure and Microtribological Behavior of DLC Film Deposited by IBAD[A];[C];1998
5 Sun Xilian Xu Xueke Shao Jianda (R&D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, 201800, China);Effect of Cr intermediate layer on the microstructure and optical properties of Ag films[A];[C];2005
6 LI Zhaosheng WANG Xianping FANG Qianfeng Key Laboratory of Materials Physics,Institute of Solid State Physics,The Chinese Academy of Sciences,Hefei 230031 S.Veprek Institute for Chemistry of Inorganic Materials,Technical University Munich,D-85747,Munich,Germany LI Shizhi Institute of Materials and Environment Sciences,Qingdao University of Science and Technology,Qingdao 266042;INTERNAL FRICTION AND YOUNG'S MODULUS OF THE nc-TiN/a-Si_3N_4 FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING METHOD[A];[C];2003
7 ;物理气相沉积CrN涂层的研究进展[A];[C];2006
8 Zhong Bin,Gou Wei,Li Guoqing ,Hu Yuanrong,Liu Zhendong State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian, 116024, China;Influence of Nitrogen Partial Pressure on Microstructures and Properties of CrN_x Coatings Deposited by Arc Ion Plating[A];[C];2006
9 Xiaozheng Yu,Zhigang Shen (Beijing Key Laboratory for Powder Technology R&D,Beijing University of Aeronautics and Astronautics,Beijing 100083,People's Republic of China);Fabrication of metal films coated on cenosphere particles using magnetron sputtering method[A];[C];2009
10 FEI Yue~1,CHANG Hui~1,TANG Bin~1,KOU Hong-chao~1,ZHU Zhi-shou~2,SHANG Guo-qiang~2,ZHOU Lian~1 (1.State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,Xi'an 710072,China; 2.Beijing Institute of Aeronautical Materials,Aviation Industry Corporation of China,Beijing 100095,China);Influence of hot rolling deformation on microstructure and texture of TB-13 alloy[A];[C];2010
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Fang Yuan~1,Liang Gaofei~(1,2),Zhu Guangming~(1,3), Wang Chengquan~1,Wu Jianchun~1,Yu Yan~1(1.Baoshan Iron & Steel Co.,Ltd.,Shanghai 201900,China;2.Shanghai Jiaotong University,Shanghai 200030,China;3.Shandong University of Technology, Zibo 255013,Shandong,China);Confocal Laser Scanning Microscopy and Its Application in In-situ Observation of Phase Transformation of Steel[J];Baosteel Technology;2006-06
2 ZHANG Jin-min1,LI Hui1,GAO Yi-long2,XU Qing-he1,WEI Bao-heng1(1.Luoyang Ship Material Research Institute,Luoyang 471039,China;2.Luoyang Tractor Institute,Luoyang 471004,China);Features of Diffuse Scattered Streak in β Phase of Ti Alloy[J];Development and Application of Materials;2008-01
3 Zhang Qihai(General Research Institute for Non-Ferrous Metals, Beijing 100088);Diffuse Scattered Streaks in SADPs of B2-Phase in TiNi Alloy[J];Rare Metal Materials and Engineering;1993-06
4 Guo Hongzhen 1, Yao Zekun 1, Lan Fang 1, Su Zuwu 1,Wang Zixiao 2, Guo Yingguang 2, Su Meiying 2 (1 Northwestern Polytechnical University, Xi'an 710072) (2 Hong Yuan Aviation Forging & Casting Industry Co., Sanyuan Shaanxi 713801);Effect of Deformation Heat-treatment on Microstructure and Properties of the Alloy Ti-1023[J];Rare Metal Materials and Engineering;2000-06
5 HU Ming, SUN Jiayi, WENG Lijun, LIU Weimin(Lanzhou Institute of Chemical Physics, Chinese Academy of Science, Lanzhou 730000, China);Tribological Properties of QSn6.5-0.1 Alloy Coated with AgCu Composite Films[J];Materials For Mechanical Engineering;2003-09
6 PENG Zhi-jian~1, MIAO He-zhuo~1, YANG Si-ze~2, LIU Chi-zi~2, QI Long-hao~1, PAN Wei~1 (1. Tsinghua University, Beijing 100084, China; 2. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China);Preparation of Ti(C,N) Coatings for Cutting Tools by Pulsed High Energy Density Plasma Coaxial Gun[J];Materials For Mechanical Engineering;2004-01
7 LI Min, LI Hui-dong, LI Hui-qi, SUN Dong-bai (Shandong University of Science and Technology, Qingdao 266510, China; Beijing University of Science and Technology, Beijing 100083, China);Wear-corrosion Behavior of Cr-Fe-C Amorphous Electroplating Deposition[J];Materials For Mechanical Engineering;2005-05
8 Yu Mengshu (Physical-Chemical Test Center of Hongdu Aviation Industry Group);Control of Structure and Performance of Alloy Forging T-10V-2Fe-3Al[J];Hongdu Science and Technology;1998-01
9 LIANG Gaofei~(1,2) WANG Chengquan~1 FANG Yuan~1 1)Advanced Technology Institute,Technology Center of Baosteel,Shanghai 201900 2)School of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200030;IN SITU OBSERVATION OF NUCLEATION AND GROWTH OF HIGH-TEMPERATUREδPHASE IN STAINLESS STEEL AISI 304 DURING HEATING[J];Acta Metallurgica Sinica;2006-08
10 WENG Li-jun, LIU Wei-min, SUN Jia-yi, Xue Qun-jiof Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China);Opportunities and Challenges to Space Tribology[J];Tribology;2005-01
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved