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《OPTICAL TECHNOLOGY》 1999-01
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Hybrid processing method of heterodyne interferometer signal for nanometrology

DAI Gaoliang, YIN Chunyong (Dept. of Precision Instruments, Tsinghua University, Beijing 100084)  
A hybrid processing method, which combines the traditional phase measurement method for inner period measurement and phase locked frequencymultiply counting method for integer periods measurement, is described. This method can achieve high resolution of 0 1nm with measuring range been enlarged. Avoid the limitation of measuring range or resolution lie in the above two traditional processing method. By introducing a acceptable redundant measurement, the integer period can be measured correctly despite of the errors may exist in counting circuit. The combination rule is described in detail. This method is adopted in a novel nanometrology interferometer, the experiment result supports the above analysis.
【Fund】: 国家自然科学基金 国家教委博士点基金 精密测试技术与仪器国家重点实验室开放基金
【CateGory Index】: TN786.1
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