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Optical Precision Measurement Technique of Rolling Error

Ma Junshan Wang Xiangzhao Fang Zujie (Shanghai Institute of Optical and F ine Mechanics,The Chinese Academy of Science,Shanghai2 0 180 0 )  
A new method to measure rolling of a precision stage using the two- pointmethod is presented.The rolling of stage and the rolling angle profile can be separated from each other by using the angle sensor output data. Experimental results showed that the rolling can be measured to 0 .0 5" determined by the stability of the rolling measurementsystem.
【Fund】: 日本尼康公司生产技术本部资助项目
【CateGory Index】: TP212
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