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《Acta Optica Sinica》 2008-07
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Structural and Optical Characteristics of ZnO Films on LiGaO_2 Substrate

Huang Taohua1,2 Zhou Shengming1 Teng Hao1,2 Lin Hui1,2 Wang Jun11Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China2Graduate University of Chinese Academy of Sciences,Beijing 100039,China  
ZnO films were fabricated on LiGaO2(001),(100) and(010) planes by magnetron sputtering.The structural,morphological and optical properties of as-grown ZnO films were investigated by X-ray diffraction(XRD),atomic force microscopy(AFM),transmission spectra and photoluminescence(PL) spectra.The results show that ZnO films on various planes of LiGaO2 have different preferred orientations., and [1120] oriented ZnO films are obtained on LiGaO2(001),(100) and(010) planes,respectively.The ZnO films show different surface morphologies and high transmittance in visible spectrum range.Only UV emission peaks located at 378 nm are observed in PL spectra of ZnO films.The(1100) ZnO film shows the highest UV emission intensity with the smallest full width at half maximum(FWHM) value.The difference in PL properties of the ZnO films is mainly due to different grain sizes.
【Fund】: 国家自然科学基金(60676004);; 上海市科委基金(06dz11402);; 国家863计划(2006AA03A101)资助课题
【CateGory Index】: O484.1;O484.41
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