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《Acta Optica Sinica》 2010-01
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Deterministic Figuring in Optical Machining by Magnetorheological Finishing

Dai Yifan Shi Feng Peng Xiaoqiang Song Ci(College of Mechatronics Engineering and Automation,National University of Defense Technology,Changsha,Hunan 410073,China)  
As a deterministic magnetically assisted polishing method,magnetorheological finishing(MRF) has the ability to produce optical surfaces with high from accuracy,high efficiency and low sub-surface damage.The principle and method of MRF process are introduced and the key techniques required to implement a MRF process are also discussed.To demonstrate a MRF process,one K9 flat(80 mm in diameter) is polished with KDMRF-1000F polishing machine and KDMRW-1 water based magnetorheological(MR) fluids.Through one MRF iteration(4.39 min),its form accuracy peak-to-valley(PV) error is improved from initial 0.144 λ to final 0.06 λ(λ=632.8 nm),root-mean-square(RMS) is improved from initial 0.031 λ to final 0.01 λ,surface iterative convergence ratio is 2.81 and roughness RMS is 0.345 nm.The result shows that MRF is a deterministic process,which results in high form accuracy,surface roughness and high efficiency.
【Fund】： 国家自然科学基金(50775215 50875256);; 部委级基金(9140A18070108KG0147)资助课题
【CateGory Index】： TH74
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