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《Acta Optica Sinica》 2012-02
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Analysis of Optical Readout Sensitivity for Uncooled Infrared Imaging Based on Optical Readout

Cheng Teng1 Zhang Qingchuan1 Gao Jie1 Mao Liang1 Wu Xiaoping1 Chen Dapeng2 1 Key Laboratory of Mechanical Behavior and Design of Materials of Chinese Academy of Sciences,University of Science and Technology of China,Hefei,Anhui 230027,China 2 Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China  
Much different from the conventional uncooled infrared imaging technique,a new optical readout uncooled infrared detector based on micro-electro-mechanical system(MEMS) is proposed.This optical readout system employs a knife filter,which has the advantages of high sensitivity,high resolution,and being highly aseismic.However,it is also influenced by various factors such as the radius and roughness of the reflector.According to the experimental validations and the theory of Fraunhofer diffraction,a theoretical model of the optical sensitivity is established,and the influences of various factors(such as the location of the knife filter,the length of the reflector,the radius of the reflector,the roughness of the reflector,the intensity of the LED,the width of the LED) to the optical sensitivity are analyzed.Based on these analyses,an optimization operation to maximize the optical sensitivity is also established.
【Fund】: 国家自然科学基金(11072233 10872189 10732080 11102201);; 中国博士后科学基金(20100480684);; 中央高校基本科研业务费专项资金(WK2090050017)资助课题
【CateGory Index】: O438;TN215
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