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《Acta Optica Sinica》 2012-02
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Preparation on Vacuum Ultraviolet Reflective Aluminum Films

Lin Dawei1 Guo Chun1,2 Zhang Yundong1 Li Bincheng1 1 Institude of Optics and Electrics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China  
To prepare aluminium coating with high performance in the spectral range of 130-210 nm,the thicknesses of Al and protective MgF2 layers are theoretically optimized and the optimum thicknesses are determined to be approximately 80 nm and 33 nm,respectively.Experimentally,MgF2 protected Al coating is prepared on a BK7 substrate using thermal-boat evaporation.The reflectance of the prepared Al coating is measured to be higher than 80% in the spectral range of 130-210 nm.The effects of deposition rate of Al and UV irradiation treatment on the spectral performance of the Al coating are studied.Aging effect is also experimentally investigated.The results show that the higer deposition rate of Al,the higher reflectance of the mirror.Correct storage method can maintain the spectral performance of the Al reflective film over time.Proper UV irradiation treatment can also enhance the reflectance of Al coating in the vacuum ultraviolet spectral range.
【CateGory Index】: O484.41
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