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《Acta Optica Sinica》 1998-01
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Measuring Scratch Width by Sampling DiffractedLight Intensity: Experiment

Dai Mingkui Xu Deyan Shen Weixing(Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800)  
An experimental arrangement has been built for measuring scratch width by sampling diffractedlight intensity. Using this arrangement, several specimen are measured, and the scratches widths can be obtained efficiently and quickly. In general case, the measuring error is smaller than ±15%.
【CateGory Index】: O436
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