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《Acta Photonica Sinica》 2018-10
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Preparation of Ultraviolet-C to Near-infrared Broadband Anti-reflective Coating

ZHANG Jing;LIN Zhao-wen;FU Xiu-hua;LIU Dong-mei;ZHANG Gong;Department of Optics and Electric Engineering,Changchun University of Science and Technology;  
In order to increase the response sensitivity of detector and reduce the loss of light energy when a broad spectrum beam is incident,a kind of optical film is developed,which can realize anti-reflective at a broadband between ultraviolet-c and near infrared.Based on the anti-reflective thin film theory,combined with tunneling and automatic optimization,an evaluation function is established by comprehensively considering the factor effect of film thickness.By optimizing the deposition process,the transmittance of the anti-reflective coating is improved.The results of spectral tests show that the average transmittance in the bands of 200 nm to 900 nm is 95.7%,which satisfies the requirement of spectroscopy detection.
【Fund】: 吉林省重大科技攻关专项(No.20140203002GX)资助~~
【CateGory Index】: TB383.2
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