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《Nuclear Fusion and Plasma Physics》 2009-01
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Characterization of Raman spectroscopy of DLC films deposited on inner surface

WANG Jun,WEN Xiao-qiong,YIN Li-yong,WANG De-zhen(Key Laboratory for Materials Modification by Laser,Ion and Electron Beams,School of Physics and Optoelectronic Technology,Dalian University of Technology,Dalian 116024)  
Diamond-like carbon(DLC) films deposition on inner surface of a stainless steel tube with 100mm in length and 10mm in inner diameter is carried out in direct current glow discharge plasma of Ar/CH4 mixed gas with a flow ratio of 20% CH4,and the influence of pressure and deposition time on micro-structure of the films is investigated by Raman spectroscopy.It is found that the position of both G and D line,the width(FWHM) of both G and D line and the ID/IG ratio all drop firstly and then rise along with the pressure increase,the lowest values occur when the pressure is 20Pa.On the other hand,along with the time evolution the position of both G and D line shift to the lower wave-number,the width(FWHM) and the ID/IG ratio of both G and D line decrease.These results reveal that the DLC films become harder,more ordered and more diamond-like with higher sp3 content,and the size of sp3 cluster grows larger along with the time evolution.
【Fund】: 国家自然科学基金资助项目(50307002)
【CateGory Index】: O484.41
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