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《Nuclear Fusion and Plasma Physics》 2010-01
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The effect of plasma sheath and collision on microwave resonator probe diagnosing

HUANG Yong,SHI Jia-ming,YUAN Zhong-cai,XU Ji-wei(Key Lab of Infrared and Low Temperature Plasma of Anhui Province,Electronic Engineering Institute,Hefei 230037)  
The effects of plasma sheath and collisions become significant in the density measurement of gas discharges at pressures greater than 133Pa.The probe model correction is performed,and the plasma sheath and collision correction factors are deduced.The effect of probe dimentions on demsity measurement is esplosed.It reveals that choosing a proper larger probe width will be beneficial to minimizing the measure error,and the most favorable value of probe radius is 0.2mm.
【CateGory Index】: O539
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