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《Journal of Shenyang Institute of Aeronautical Engineering》 2008-01
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The diversity of floating voltage in the process of mode transition in ICP

ZU Xin-hui SUN Jing-chao ZHANG Jun LI Jun-long(Shenyang Institute of Aeronautical Engineering,Liaoning Shenyang 110034)  
The changing's diversity of floating voltage as absorbed power in the process of E-H mode transition in inductively coupled plasma is studied.At 5W-1000W of radio-frequency power and 2Pa-50Pa of pressure,Using advanced Z-Scan measuring system,current probe and voltage probe,measuring many parameters including plasma absorbed power,antenna current,antenna voltage,and plasma floating voltage,the effects on the properties of transition between plasma discharge E-mode and H-mode transition by changing impedance matching network,coupled density of antenna,area of installation conductor ground and pressure are studied.The concepts of positive and negative feedback regions are established basing on the influencing of stray capacitor in impedance matching work to the output power of radio-frequency power supply.The part phenomena are analyzed in theory.
【CateGory Index】: O539
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1 SUN Jing-chao1 DING Zhen-feng2(1.Shenyang Institute of Aeronautical Engineering,Liaoning Shenyang 110136;2.Dalian University of Technology State Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Liaoning Dalian 116024);The study of driven oscillation in inductively coupled plasma[J];Journal of Shenyang Institute of Aeronautical Engineering;2009-01
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