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《Journal of South China Normal University(Natural Science)》 1985-01
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A REAL-TIME WHITE LIGHT INFORMATION PROCESSING SYSTEM FOR IC PHOTOMASK INSPECTION

Cen Zhaochang Zhang Kunming Zhao Duancheng Li Jiemei Li Shaoquan  
A real-time white light information processing System using spatial filtering for IC photomask inspection is described. Inspection with this system is simpler and more convenient than the normal method with the microscopy or the technique with a coherent optical processing equip-ment. With the aid of this system, small defects such as black spots, pinholes, projections, loss of circuits, short-circu jts, or disconnections, etc. would be made obviously observable.
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 F. T. S. Yu (Electrical Engineering Department, Pennsylvania State University) ZHUANG SONGLIN (Shanghai Institute of Optical Instruments) Mu GUOGUANG (Department of Physics, Nankai University, Tianjin);Recent advancement in white light optical information processing[J];Acta Optica Sinica;1981-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Liu Yanming (The Teaching and Research Section of Contemporary Optics of DIT, China);Pseudo-color Coding by Phase Modulating Grating Using the partially Coherent Light Theory Analysis[J];;1985-01
2 Cen Zhao-chang, Zhao Duan-cheng, Zhang Kun-ming (South China Normal University). Li Shao-quan, Li Jie-mei (Guangzhou University).;Spotting IC Photomask Defects by Using White Light Spatial Filter Processor[J];Acta Electronica Sinica;1986-05
3 White Light Information Processing Group (Institute of Modern Optics of Nankai University, Tianjin 300071);The Progress of Technique on Color Photography with Tricolor Grating and Black White Film[J];ACTA OPTICA SINICA;1998-05
4 Wang Xianglin Huang Yichun Zhao Xiufu Yan Weilin;Applicacioll of Pscudocolor Encoding in Medical Diagnosis[J];;1992-02
5 Bao Lianybi Wu ShixiongYang Mingwu Cuan Zhiliang(Laoet Insitution,Hefei Techmology University )Xu Weimin You Xianqing(Matotld Departruerd,Hefei Techmology University)Zhang Guizhen(Anhui Optuelectronic Techniqne Institution );STUDY ON PSEUDO-COLOR PROCESSING OF METALLOGRAPHY FILM[J];Journal of Hefei University of Technology(Natural Science);1993-S1
6 JIANG BAICHUAN;LIU LIU YUMIN Shanghai Institute of Physiology, Academia Sinica;AN ANALYSIS ON THE EQUIVALENCE OF THE EYE TO A SYSTEM WITH ABERRATION[J];中国科学B辑(英文版);1982-09
7 Ou Mingfu, Ma Xuanwen, Wang Rong, Jiang Jiwang;A New Technique of Making Three-Dimensional Geography Map of Holography by Using Airphoto Pair[J];JOURNAL OF THE PLA INSTITUTE OF SURVEYING AND MAPPING;1996-01
8 Liu Baoshen, Han Gang, Lin Shutian , Liu Chunyang (Department of Engineering Mechanics);A Multiplicated Technique of Interfering Fringes by the White Light Information Processing System[J];Journal of Tsinghua University(Science and Technology);1984-04
9 MU GUO-GUANG WANG ZHAO-QI WU FA-XIANG ZHANG NENG-YU (Modern Optics Research Lab., Nankai University, Tianjin);WHITE-LIGHT STEREOPROJECTION WITH MODULATED SPECKLE ENCODING[J];Acta Physica Sinica;1982-11
10 Huang Xianlie (Department of Physics);Pseudocolor Encoding of Black and White Images by Speckle Modulated Technique[J];Journal of Xiamen University(Natural Science);1982-04
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