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《Infrared Technology》 2007-02
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Study on the Photoluminescence Properties of Ge/Si multilayer Films Deposited by Magnetron Sputtering

SONG Chao,KONG Ling-de,YANG Yu(Department of Materials Science and Engineering Yunnan University,Kunming Yunnan 650091,China)  
The series of Ge/Si multilayer films have been prepared by magnetron sputtering on c-Si(100) substrates at different periods and Ge thickness.Room-temperature photoluminescence spectra,Raman scattering spectra and AFM image were carried out in order to investigate the quliity of the samples.The results indicate that the emission peak of PL comes from the Ge crystal grains in the Ge/Si multilayer.And the uniformity of the Ge crystal grains has great influence on the PL.When the Ge crystal grains are uniform,quantum confinement effect is strong.The blue shift of PL band position takes place as the Ge crystal grains become smaller.When the Ge crystal grains are not uniform,the weak emission peak intensity of PL is observed,and the quantum confinement effect in the Ge crystal grain is unconspicuous.
【Fund】: 国家自然科学基金资助项目(编号:60567001) 杨宇 E-mail:yuyang@ynu.edu.cn
【CateGory Index】: O484.41
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