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《Infrared Technology》 2015-04
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The Photoelectrical Properties of VO_x Film by As-deposited SiO_x Dielectric Layer

KONG Ling-de;FANG Hui;WEI Hong;LIU Li;ZHOU Ruan-sheng;TIE Xiao-ying;YANG Wen-yun;JI Rong-bin;Kunmming Institute of Physics;North Guangwei Integrated Circuits Inc.;  
The photoelectrical properties of VOx film by as-deposited SiOx dielectric layer is proposed to enhance infrared ray absorption coefficient of pixel microbridge, and improves quare resistance and TCR stability of VOx active film. In this paper, we prepare a series of 50 nm VOx films by ion beam sputter deposition and then 30 nm SiOx film sare deposited. We bring in RGA and temperature condition as technical parameters to adjust Oxygenic content of VOx films, and test electrical properties of VOx film and SiOx/VOx film stack, which improves square resistance and TCR stability of VOx active film.
【CateGory Index】: O484.4
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【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 ;The Present Development And Status Of Infrared Focus Plane Array Technology[J];Sensor World;2005-05
2 Liu Fengju, Yu Zhiming, Chen Shuang, Fang Mei (Key Laboratory of Education Ministry for Non-Ferrous Metal Materials-Science and Engineering, Central South University, Changsha 410083, China);Vanadium Oxide Thin Films Prepared by Reactive Magnetron Sputtering[J];Rare Metal Materials and Engineering;2008-12
3 SHEN Guang-ping, QIN Ming( The Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing, Jiangsu 210096, China);The Packaging of MEMS Sensor[J];Equipment for Electronic Products Manufacturing;2006-05
4 HUANG Wei-gang,WANG Yan(College of Materials Science and Engineering,Sichuan University,Chengdu 610065,China);Microstructure and property of VO_2 thin films deposited on glass substrate by R.F magnetron sputtering[J];Journal of Functional Materials;2010-05
5 Wen Yuejiang Xu Xiangdong He Qiong Fan Taijun Yang Shubing Huang Long Ao Tianhong Ma Chunqian Jiang Yadong(School of Optoelectronic Information,University of Electronic Science and Technology of China, Chengdu,Sichuan 610054,China);Preparation and Properties of Vanadium Oxide-Carbon Nanotube Composite Films[J];Acta Optica Sinica;2012-05
6 Zha Zizong Wang Qi Li Xuechun Wang Jun (Research Institute of Opto Electronics of HIT, Harbin 150001);Experemental Study of Response Properties of VO 2 Films to TEA CO 2 Laser[J];ACTA OPTICA SINICA;1996-08
7 Fang Guojia 1, 2, 3 , Liu Zuli 2, Wang Youqing 1 , Zhou Yuanming 3 , Yao Kailun 1, 2, 4 (1. National Laboratory of Laser Technology, Huazhong University of Science & Technology, Wuhan 430074; 2. Department of Physics, Huazhong Universi;PREPARATION AND STRUCTURAL PROPERTIES OF HIGHLY c-AXIS ORIENTED V_2O_5 THIN FILMS BY PULSED LASER DEPOSITION[J];Journal of The Chinese Ceramic Society;2001-01
8 DU Shan,HUANG Mei-dong,LIU Chun-wei,TANG Xiao-hong,LYU Chang-dong(College of Physics and Electronic Information Science,Tianjin Normal University,Tianjin 300387,China);Influence of Gas Flow Ratio of Oxygen and Argon on Structure and Optical Properties of Sputtered Vanadium Dioxide Thin Films[J];Surface Technology;2013-04
9 WU Zheng,LU Jian-ming,BAI Pi-ji,TIAN Ying(Kunming Institute of Physics,Kunming 650223,China);Development Status of Uncooled Thermal Imaging System Based on Microbolometers in Russia[J];Infrared Technology;2011-08
10 ZHANG Ning,WU He-ran,ZHOU Yun,JIANG Ning,JIANG Ya-dong(State Key Laboratory of Electronic Thin Films and Integrated Devices,School of Optoelectronic Information, University of Electronic Science and Technology of China,Chengdu 610054,China);Using the Three-dimension Noise Model to Test and Analyze the ROIC of UIRFPA[J];Infrared Technology;2012-06
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