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Radius of curvature measurement for micro-nano components

WANG Jianquan;TIAN Xinli;ZHANG Baoguo;WANG Pengxiao;National Key Laboratory for Remanufacturing,Academy of Armored Forces Engineering;China Astronaut Research and Training Center;  
To acquire the radius of curvature(ROC)for opaque micro-nano components with high precision,a new technology was introduced in the research,according to the digital image with measuring scale of the investigated subject,and ROC was calculated after the contour edge detection and curve fitting based on the least square law.The modified median filtering was presented to pre-process scanning electron microscope(SEM)images of the experimental diamond particle,together with the histogram equalization method.Then,the nonlinear polynomial with high order was used to fit the sampling points on the contour edge of the diamond particle detected by the Canny edge detection operator.Further,the actual ROC of the components was calculated combining with the measuring scale on SEM image.The measuring error analysis shows that the deviation of the actual value using this technology is less than 10%for the diamond particle,and as the magnification rate of SEM,the amount of sampling points on contour line and the order of fitting model are 1 200,80and 20respectively,which indicates a high measuring precision and application value.
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