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《LASER & INFRARED》 1997-01
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The Experimental Study on the Etching Performance of ITO Films

The wet etching properties of Indium Tin Oxide films are disscussed in this paper. The relationship between the Etching rate and the temperature is studied. Some different composition of etchants of ITO films are compared. It was found that the HCl∶ HNO_3∶ H_2O with volume ration of 50∶ (3-9)∶50 heated to 5O℃-60℃ are very ideal etchants for the wide production usage.
【CateGory Index】: TN304.
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【References】
Chinese Journal Full-text Database 5 Hits
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1 FAN Zhi xin,SUN Yi cai and CHEN Jiu lin(Department of Applied Physics,Hebei University of Technology,Tianjin 300130,China);Theoretical Calculation of Optimum Doping Content in Oxide Semiconductor Transparent Conductive Films[J];Chinese Journal of Semiconductors;2001-11
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