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《LASER & INFRARED》 1997-01
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The Experimental Study on the Etching Performance of ITO Films

The wet etching properties of Indium Tin Oxide films are disscussed in this paper. The relationship between the Etching rate and the temperature is studied. Some different composition of etchants of ITO films are compared. It was found that the HCl∶ HNO_3∶ H_2O with volume ration of 50∶ (3-9)∶50 heated to 5O℃-60℃ are very ideal etchants for the wide production usage.
【CateGory Index】: TN304.
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Chinese Journal Full-text Database 5 Hits
1 Nie Er Luo Xingzhang Zheng Zheng Sheng Ming(State Key Laboratory of Pollution Control and Resource Reuse,School of the Environment,Nanjing University,Nanjing 210093);Treatment of liquid crystal and recovery of indium from liquid crystal display[J];Chinese Journal of Environmental Engineering;2008-09
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