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《Laser & Infrared》 2003-04
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Study on Fabrication of Nanostructure Using Atomic Force Microscopy

ZHU Jimu,ZHANG Haijun,ZHANG DongxianUniversity,Hangzhou 310027,China)  
A method of nanofabrication using atomic force microscopy is described.It is shown that the depth of fabrication depends on the load and scanning times of the tip.Nanostructures are obtained on surface of Al2O3 with the tip of AFM. And reliability of this method is approved.It points that nanofabrication based on AFM can be a powerful tool for production of nanoscale devices.
【CateGory Index】: TH742
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