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《Laser & Infrared》 2007-01
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The Influence of the Thickness between the Sample and Solid Immersion Lens on the Resolution of Microscopy System

SHI Hua-ping,ZHANG Yao-ju,SUN Ce(College of Physics and Electronic Information,Wenzhou University,Wenzhou 325027,China)  
Considering the effects of the thickness of the film between the solid immersion lens(SIL) and the microscopy sample,the optical field distribution of the SIL system is analyzed using the vector diffraction theory.The analyses and calculations show that the intensity of spot,spot size and sidelobe intensity oscillate with the thickness of the film.When the thickness of the film is given,the spot size and sidelobe intensity is basically unchanged in the vicinity of the sample's surface,but the intensity of spot increases at the beginning of increasing the depth into the sample and then decreases.The focus of the system slightly shifts into the sample.It is found that the resolution is higher when the refractive index of gap material matches the SIL's refractive index.
【CateGory Index】: O436
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