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《Laser & Infrared》 2011-09
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Breakdown model of micro channels fabrication in fused silica substrates by laser-induced plasma

LI Shi-xiong,BAI Zhong-chen,HUANG Zheng,ZHANG Xin,QIN Shui-jie(Key Lab of Photoelectron Technology and Application,Guizhou University,Guiyang 550025,China)  
A Q-switched Nd∶YAG laser is used to fabricate micro channels in a 1 cm3 fused silica substrate.The work is done by laser-induced plasma.The interior wall of the micro channels is smooth and the depth of the channels is up to 4.2 mm.The model of moving breakdown induced by laser pulses is set up and analyzed.The model can be used to predict the breakdown of micro channels fabricated by laser-induced plasma with nanosecond Nd∶YAG laser pulses.The model can also be used to analyze the channel characteristics.The model conforms to the experimental results well.
【Fund】: 贵州省社会发展攻关项目(No.黔科合SY[2010]3037号);; 贵州省科学技术基金项目(No.黔科合J字[2010]2103号);; 贵州大学研究生创新基金项目(No.校研理工2011004)资助
【CateGory Index】: TN249
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