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《Acta Metrologica Sinica》 2007-03
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Subdivision and Elimination of Nonlinearity in Heterodyne Interferometers

HOU Wen-mei,WANG Jun(College of Optic & Electronic Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)  
An interesting and significant approach is found to decrease the nonlinearity for heterodyne interferometers.The theoretical and experimental investigations show that it can efficiently reduce the nonlinearity of heterodyne interferometer,whether this error is in the first order or the second order,even if it is caused by any reason.This method can be used in scientific research and is especially suitable for the industrial precision measurement,thus it has practical meaning for the development of nanomeasurement.
【Fund】: 国家自然科学基金(50675141);; 上海市重点学科建设项目(T0501)
【CateGory Index】: TH744.3
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7 WANG Sheng1,2,LIU Hongzhao1,YUAN Daning1 (1.Faculty of Mechanical and Precision Instrument Engineering,Xi`an University of Technology Xi`an 710048,China; 2.Department of Engineering Management,ShaanXi Business College,Xi`an 710119,China);Laser Measurement and Errors Compensation of Position Accuracy for CNC Heavy-Duty Horizontal Lathe[J];Journal of Xi'an University of Technology;2011-03
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