Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Acta Metrologica Sinica》 2007-03
Add to Favorite Get Latest Update

Subdivision and Elimination of Nonlinearity in Heterodyne Interferometers

HOU Wen-mei,WANG Jun(College of Optic & Electronic Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)  
An interesting and significant approach is found to decrease the nonlinearity for heterodyne interferometers.The theoretical and experimental investigations show that it can efficiently reduce the nonlinearity of heterodyne interferometer,whether this error is in the first order or the second order,even if it is caused by any reason.This method can be used in scientific research and is especially suitable for the industrial precision measurement,thus it has practical meaning for the development of nanomeasurement.
【Fund】: 国家自然科学基金(50675141);; 上海市重点学科建设项目(T0501)
【CateGory Index】: TH744.3
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 3 Hits
1 DENG Yuan-long1,LI Xue-jin2,CHAI Jin-long1,XU Gang1(1.College of Mechatronics & Control Engineering;2.College of Physical Science and Technology,Shenzhen Univ.,Guangdong 518060,China);Influence of parasitic ghost reflection on measurement in a heterodyne interferometric ellipsometer[J];Optical Technique;2009-03
2 Deng Yuanlong~(1,2) Li Yuezhi~1 Wu Yubin~1 Xu Gang~(1,2) 1College of Mechatronics & Control Engineering , Shenzhen University , Shenzhen, Guangdong 518060, China 2Shenzhen Key Laboratory of Advanced Die-Manufacturing Technology , Shenzhen, Guangdong 518060, China;Influence of Metal-Coated Mirrors on Measurement Accuracy in Heterodyne Interferometric Ellipsometry[J];Chinese Journal of Lasers;2009-02
3 Yang Chun-sheng1,2,Zhang Tao1,Cheng Jun-kang1,Liu Guo-dong1(1.School of Manufacturing Science and Engineering,Sichuan University,Chengdu 610065,China;2.National Institute of Measurement and Testing Technology,Chengdu 610021,China);Influence of nonlinearity on measuring precision of dualfrequency laser interferometer with two longitudinal modes[J];Journal of Jilin University(Engineering and Technology Edition);2008-03
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Hou Wen-mei and Qiu Hui-fu;The Influence of Elliptical Polarization of Zeeman-Laser upon the Heterodyne Phase Comparing Interferometry[J];Acta Metrologica Sinica;1988-03
【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 WANG Li,HOU Wen-mei(Dep.of Optic & Electronic Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China);A 4-channel Quadrature Detector System in Homodyne Interferometer[J];Acta Metrologica Sinica;2006-04
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 ZHAO Hui jie ZHANG Guang jun (Beijing University of Aeronautics and Astronautics, School of Automation Science and Electronic Engineering);Factors Affecting the Precision of Heterodyne Interferometer[J];Journal of Beijing University of Aeronautics and Astronautics;2002-02
2 WT4BX]LIN Peng,CHEN Xiao qiang,YUAN Xiang hui,LIAO Nian zhao (The Open Laboratory for Optoelectronic Technology System of the State Education Commission of China, Chongqing University,Chongqing,400044,China);Precision Analysis on Linear Encoder with Coarse Grating before and after Eliminating the Subdivision Error[J];JOURNAL OF CHONGQING TEACHERS COLLEGE(NATURAL SCIENCE EDITION);2000-03
3 DAI Li-an(China Certification & Inspection Group Jiangsu Co.,Ltd.Nanjing 210001,China);Applications of Grating Measurement Technology in Producing Wiring Harness[J];Chinese Journal of Electron Devices;2007-05
4 LI Hong-jun, WU Fan, LIU En-hai (Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China);A comprehensive estimating system for signal quality of metrological grating[J];Opto-electronic Engineering;2002-04
5 ZHONG Zhi , TAN Jiu-bin, CHEN Hong-fang, SHAN Ming-guang (Institute of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin,150001,China);A Novel Method to Measure the Nonlinearity in Laser Heterodyne Interferometer[J];Journal of Optoelectronics.laser;2005-07
6 Lin Xiaojun Shi Yaoyao Wang Wenhu et al;Digital Subdividing Technique for Grating Signal and Its Error Analysis[J];Tool Engineering;2006-10
7 SU Shao jing, LU Hai bao, LI Sheng yi [WT5BX](Institute of Mechatronics Engineering National University. of Defense Technology, Changsha 410073, China)[WT5BZ] [WT5HZ];DSP based counting and ultra-precision subdivision of Moiré fringe with wide dynamic range[J];Optics and Precision Engineering;2001-02
8 LiJiangguo; Xuan Ming and WangYifan(Chang chun Institute of Optics and Mechanics, Chinese Academy of Sciences,Changchun 130021 );Software Compensation Method of Phase Error In Morie’Strip Division[J];Optics and Precision Engineering;1995-01
9 Ji Gang Ye Jun (Tept.of Mechanics,Qingdao University,Qingdao 266071);A Divide Method Remedying Signal Defects[J];OPTICS AND PRECISION ENGINEERING;1997-01
10 Wang Yueqiong (Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Changchun 130022);Subdivision Method on Signals of High Speed Moire Fringe by Single chip Micro Computer[J];OPTICS AND PRECISION ENGINEERING;1997-01
【Secondary References】
Chinese Journal Full-text Database 7 Hits
1 Wu Yanhua,Dong Lu,Zhang Tao Wu Yanhua,Lecturer,Doctoral Candidate, State Key Laboratory of Hydraulics and Mountain River Engineering of Sichuan University ,Chengdu 610065,China;Study on High Measuring Speed Dual-frequency Laser Interferometer with Two Longitudinal Modes[J];Tool Engineering;2010-07
2 Liu Binbin Yuan Yonggui Wang Xinxing Huang Fengzhen Yang Jun Yuan Libo (Photonics Research Center,School of Science,Harbin Engineering University,Harbin,Heilongjiang 150001,China);Real-Time Nonlinearity Error Correction Method of Polarizing Laser Interferometer[J];Acta Optica Sinica;2010-09
3 Li Liyan Yuan Yonggui Wu Bing Liu Binbin Yang Jun Yuan Libo(Photonics Research Center,School of Science,Harbin Engineering University,Harbin,Heilongjiang 150001,China);Effect of Wave Plate on Nonlinear Error in Single-Frequency Polarized Laser Interferometer[J];Acta Optica Sinica;2011-01
4 WANG Jian,YANG Jun(College of Science,Harbin Engineering University,Harbin 150001,China);Research of a DSP-based Real-time Demodulation Method of One-frequency Laser Interferometer[J];Journal of Engineering of Heilongjiang University;2011-01
5 Li Xing1,2 Huang Jianbing1 Wei Chaoyang1 Wang Yanzhi1,21Research and Development Center for Optical Thin Film Coatings,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China2Graduate University of Chinese Academy of Sciences,Beijing 100049,China;Metal-Dielectric Multilayer Coating Design Achieving Broadband and High-Reflectance and 270° Phase Retardation[J];Chinese Journal of Lasers;2010-12
6 LI Yang,WU Zhen-lin,LI Hui,ZHANG Tao,(Institute of Applied Laser,School of Manufacture Sci.and Eng.,Sichuan University,Chengdu 610065,China);6D laser measurement system based on double longitudinal mode laser with thermal frequency stabilization[J];China Measurement & Test;2009-02
7 WANG Sheng1,2,LIU Hongzhao1,YUAN Daning1 (1.Faculty of Mechanical and Precision Instrument Engineering,Xi`an University of Technology Xi`an 710048,China; 2.Department of Engineering Management,ShaanXi Business College,Xi`an 710119,China);Laser Measurement and Errors Compensation of Position Accuracy for CNC Heavy-Duty Horizontal Lathe[J];Journal of Xi'an University of Technology;2011-03
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved