Research and Design on High Accuracy SAW Surface Finish Transducer
Yao Ling (Ningbo Dev. Zone United Dev. Co., Ltd, Ningbo 315803)
In this paper, a design idea of new type high accuracy SAW surface finish transducer is presented. The operating principle, the way of signal processing,the static and dynamic characteristics on the transducer are analysed and researched.Research results show that this transducer not only has main advantages of inductive surface finish transducer, but also has merits of much higher sensitivity and resolution,insensitive to environment temperature and vibration interferences, and signal with digital output form and so on. The transducer can obtain high displacement sensitivity of 10 kHz/μm and excellent linearity when the centre frequency of the surface acoustic wave delay-line oscillator is 40 MHz.
【CateGory Index】： TP212.1