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《Heat Treatment of Metals》 2010-04
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Influence of different processes on microstructure and properties of TaN thin film

JI Xin1,ZHOU Xi-ying2,MI Yi-ming1,YAN Zhi2,ZHANG Chao-min1(1.College of Fundamental Studies,Shanghai University of Engineering Science,Shanghai 201620,China; 2.College of Material Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)  
TaN thin film was fabricated on silicon substrate by magnetron sputtering method.The surface morphology and microstructure of TaN thin film under different processes were investigated by atomic force microscope and X-ray diffractometer.The mechanical properties and corrosion resistance property of TaN thin film were tested by nano indenter and CHI-electric-chemistry analyser.The results show that heating on substrate and annealing have significant effect on microstructure variation of TaN thin film from hexagonal structure TaN(110) to face-centered cubic structure TaN(111) and TaN(331).Furthermore,the mechanical properties(microhardness,film-substrate cohesive force,etc) of TaN thin film are increased by above two heating processes.However,the fracture toughness and corrosion resistance of TaN thin film are decreased.
【Fund】: 上海市科技发展基金(07ZZ159);; 上海市重点学科建设项目(J51402);; 上海工程技术大学创新基金(A0500E76308);; 上海市教委创新项目(08YZ157);; 上海市教委优青项目(GJD-07017)
【CateGory Index】: TB43
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