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The Design of the New Wafer-Handing Manipulator

Chen Ding1,2 Xu Chang-jie1 Wang Yu2 Cheng Si-hua2 (1.School of Opto-electronics Engineering, Xi'an Technological University, Xi 'an Shaanxi 710032, China; 2. Workshop of Airplane Fire Control, Sicong Opto-electronics Ltd., Xi 'an Shaanxi 710043, China)  
The paper introduces the composition, characteristics of a kind of special water-handing manipulator that can transport silicon water accurately, steadily, and cleanly. In this system, the mechanism of the manipulator is designed especially, so it avoids touching the top of silicon water directly, and the level of pollution of silicon water reduces to the least in process. Through adopting PLC, the system can control all kinds of movements, and it makes water-handing manipulator grasp, up-down, and rotate. Compared with other manipulator, its structure is sample, compact, and the operational reliability is good.
【CateGory Index】: TP241
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