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《Science Technology and Engineering》 2014-17
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Study on Dynamic Mechanical Behavior of MEMS Based on Free Hopkinson Pressure Bar

LI Cai-hua;DENG Qiong;QI Wei;School of Aeronautics,Northwestern Polytechnical University;  
Based on the technique of free Hopkinson pressure bar,the test of high overload on MEMS specimens is carried out,and the discussion of dynamic mechanical behavior with different acceleration pulse width and amplitude is conducted too. The results showed that the failure of the MEMS specimens depend both on the acceleration pulse width and amplitude. The critical acceleration is 34 000 g with the pulse width about 90 μs,and 12000 g with the pulse width about 170 μs. The critical crushed impact energy value is 28 J. The main failure mode of MEMS specimens is fracture of the siliceous substrate after analyzing the tested specimen by SEM.
【Fund】: 国家自然科学基金(10872174)资助
【CateGory Index】: TH-39
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