Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Physical Testing and Chemical Analysis Part A Physical Testing》 2003-09
Add to Favorite Get Latest Update


LI Jia-bao, QIN Ming, MA Su-yuan, CHEN Chang-rong (Shenyang National Laboratory for Materials Science, Institute of Metal Research, The Chinese Academy of Sciences, Shenyang 110016, China) Vincent JI (LM3 ESA CNRS 8006, ENSAM, 151 Bld. de l′Hpital, Paris 75013, France)  
A new method is presented to measure the equivalent stress-equivalent uniaxial strain curve, yield strength and strain-hardening exponent of a polycrystalline film on substrate using X-ray stress analysis and strain gauge techniques. Using this method, the obtained proof stresses corresponding to permanent equivalent uniaxial strain 0.1% and 0.2% are 4.2GPa and 4.4GPa respectively for a 2.5μm thick TiN film, and 328MPa and 415MPa respectively for a 2.4μm thick Cu film. By stepwise removal of a TiN film having a thickness of 2.3μm and measuring the variation in substrate curvature, the depth distribution of the residual stress in the film were acquired. A new technique for measuring the Poisson′s ratio of thin films using X-ray stress analysis technique is proposed, and the measured value for a TiN film is 0.27. A tentative idea for getting the Young′s modulus of ceramic films is also put forward in this paper.
【Fund】: 国家自然科学基金资助项目(59931010 50272067)
【CateGory Index】: O484.5
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 4 Hits
1 JIA Da-wei1,SHI Hui-ji1,ZHONG Bin2,YU Hui-chen2,NIU Li-sha1(1.School of aerospace,Tsinghua University,Beijing 100084,China;2.Beijing Institute of Aeronautical Materials,Beijing 100095,China);Mechanical Parameter Measurement of Coating on Nickel-Based Directionally Solidified Superalloy[J];Journal of Aeronautical Materials;2007-03
2 LIU Feng-zhi(College of Science,Liaoning University of Petroleum and Chemical Technology,Fushun 113001,China);Research for mechanics characteristics of metal material surface in hard state[J];Journal of Natural Science of Heilongjiang University;2005-06
3 JI Hao QIAO ShengRu GONG ManFeng HAN Dong ZHANG ChengYu(Ultra-high-temperature Structural Composites Laboratory,Northwestern Polytechnical University,Xi'an 710072,China);MEASUREMENT FOR THE MECHANICAL PROPERTIES OF PVD TiN COATING[J];Journal of Mechanical Strength;2009-02
4 ZHAO Hai-Jun~1,SHI Jian-Xin~1,CHEN Fa~2,WANG Xue-Nong~2 (1.College of Mechanical Engineering & Traffic,Xinjiang Agricultural University,Urumqi 830052,China; 2.Agricultural Mechanization Institute,Xinjiang Academy of Agricultural Sciences,Urumqi 830000,China);Comparative Analysis of Working Capacity Effect on Structure of Two Kinds of Platen for Collecting Plastic Film Residue[J];Journal of Luoyang Institute of Technology;2005-01
Chinese Journal Full-text Database 3 Hits
1 LI Jiabao (State Key Labomtory for Fatigue and focture of Materials, Institute of Metal Researeh,The Chinese Academy of Sciences, Shenyang 110015);DETERMINATION OF SUPERFICIAL STRESS-STRAIN RELATIONSHIP WITH X-RAY DIFFRACTION TECHNIQUE[J];CHINESE JOURNAL OF MATERIAL RESEARCH;1998-03
2 CHEN Longqing ZHAO Minghao ZHANG Tong Yi (Department of Mechanical Engineering, Hong Kong University of Science and Technology, Hong Kong, China);THE TESTING METHOD OF MECHANICAL PROPERTIES OF THIN FILMS[J];Journal of Mechanical Strength;2001-04
3 WANG Yu ming (Jilin University, Changchun 130023, China);THE PHYSICAL MEASUREMENT ON MECHANICAL PROPERTIES OF THIN FILMS AND COATINGS[J];Physical Testing and Chemical Analysis Parta Physical Testing;2002-11
Chinese Journal Full-text Database 10 Hits
1 WU Gui-fang, SONG Xue-ping, LIU Yong, LIN Wei, SUN Zhao-qi (Department of Physics, Anhui University, Hefei230039,China);Effects of substrate temperature on the stress properties of sputtering Cu film on Si wafer[J];Journal of Anhui University(Natural Sciences);2004-03
2 SONG Xue-ping, WANG Pei-hong,SUN Zao-qi (School of Physics and Material Science,Anhui University,Hefei 230039,China);Effect of annealing temperature on the microstructure and optical constants of Al film[J];Journal of Anhui University(Natural Sciences);2005-03
3 WEN Jie HUANG Yonggang HWANG Keh-Chih (Failure Mechanics Laboratory,Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China) (Department of Mechanical and Industrial Engineering,University of Illinois,Urbana,IL61801,USA);THE VOID-SIZE EFFECT ON PLASTIC FLOW LOCALIZATION IN THE GURSON MODEL[J];力学学报(英文版);2004-04
4 F. Zhang. K.-C. Hwang FML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China E-mail: huangkz@mail.tsinghua.edu.cn; Tel.: 86-010-62772916 Fax: 86-010-62772916 Y. Huang Dept. of Mechanical and Industrial Engineering, University of Illinois, Urbana, IL 61801, USA;The indenter tip radius effect in micro- and nanoindentation hardness experiments[J];力学学报(英文版);2006-01
5 ZHANG Hai xia 1,ZHANG Tai Hua 2,HUAN Yong 2 (1.Institute of Microelectronics,Peking University,Beijing100871,China; 2. State Key Lab of Nonlinear Mechanics,Institute of Mechanics,Chinese Academy of Sciences,Beijing100080,China);Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film[J];Micronanoelectronic Technology;2003-Z1
6 CHEN Zhang1,SU Wei2,WAN Min1 (1.School of Mechanical Engineering and Automation,Beihang University,Beijing 100083,China; 2.Insititute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China);Test Methods for MEMS Material Mechanical Properties[J];Micronanoelectronic Technology;2007-06
7 KONG Qing-feng~ 1,2 ,LIANG Jing-qiu~ 1,2* ,ZHONG Yan-chao~ 1,2 ,HOU Feng-jie~ 1,2 ,LI Jia~ 1,2 ,SUN De-gui~1 1. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130031, China 2.Graduate School of Chinese Academy of Science, Beijing 100039,China;Optimized Design for a PI-Cantilever Electromagnetic Actuation MOEMS Optical Switch[J];Chinese Journal of Sensors and Actuators;2006-05
8 GUAN Rong-feng(Department of Electronics and Information Engineering,Suzhou University of Science and Technology,Suzhou 215011,China);Study on MEMS devices die bonding process*[J];Transducer and Microsystem Technologies;2008-04
9 GUO Xing-Wu~1, WANG Xi-Shu~2, DING Wen-Jiang~1, LU Chen~1, ZHAI Chun-Quan~1(1. National Engineering Research Center for Light Alloy Net Forming, School of Material Science & Engineering, Shanghai Jiao Tong University, Shanghai 200030; 2. Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China);Influence of Anodization on Mechanical Properties of AZ91D Magnesium Alloy[J];Materials Protection;2003-12
10 SHAN Guifang, YANG Wei, FENG Jianmin, YANG Mingbo(College of Polymer Science and Engineering, Sichuan University, State Key Laboratory of Polymer Materials Engineering, Chengdu 610065);Advances in Test Methods for Poisson’s Ratio of Materials[J];Materials Review;2006-03
China Proceedings of conference Full-text Database 4 Hits
1 Ming Y.He~(*,1)) Anthony G.Evans~* A.Yehle~+ *(Materials Department,University of California Santa Barbara,Santa Barbara,CA 93106,USA) +(ITN Energy Systems,Wheat Ridge,CO 80127,USA);A criterion for the avoidance of edge cracking in layered systems[A];[C];2007
2 ZHENG Hui1,ZHENG Xuejun1,2,WANG Jiashi1,SONG Shutao1(1.Faculty of Materials,Optoelectronics and Physics,Xiangtan University,Xiangtan,Hunan 411105,P.R.China;2.Key Laboratory of Low Dimensional Materials and Application Technology(Xiangtan University),Ministry of Education,Xiangtan,Hunan 411105,P.R.China);Determining the electromechanical coupling coefficients of transversely isotropic piezoelectric thin films via FEM and nanoindentation[A];[C];2010
3 ;A Review of Mechanical Properties Test Methods forMEMS Material[A];[C];2006
4 Zhang Long1 Zhu Jian 1,2 Wu Jing1 Zhuo Min1 Chen Chen 1,3 1. Nanjing Electronic Devices Institute, Nanjing, 210016 2. Southeast University,Nanjing,210096 3. Nanjing University, Nanjing, 210000;Making Low-stress Metal Thin Films with Magnetron Sputtering[A];[C];2005
Chinese Journal Full-text Database 10 Hits
1 Fang Xianli1, Gu Dongya2, Wang Yong3, Chen Xianyi1(1. College of Materials Science and Engineering, Nanjing University of Technology, Nanjing 210009, China;2. Department of Chemical Engineering,Yancheng Textile Vocational Technology College, Yancheng 224005, China;3. College of Chemistry and Chemical Engineering, Nanjing University of Technology, Nanjing 210009, China );PROGRESS IN COMPATIBILIZATION OF STARCH FILLED POLY(LACTIC-ACID) SYSTEM[J];Engineering Plastics Application;2007-03
2 Wang Yongkang, Xia Lifang,Lei Tingquan,Xiong Renzhang,Bai Yu;STUDY ON TiAlN/Ti MULTI COMPONENT COMPOSITE COATING BY XTEM[J];Ordnance Material Science and Engineering;2000-06
3 MEI Nian-song,HUANG Qing-an (Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing210096,China);Beam test structure of MEMS for measuring fracture strength[J];Semiconductor Information;2002-12
4 Nie Meng,Huang Qing’an,and Li Weihua(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);An In-Situ Extracting Method for Residual Stresses of a Multilayer Film by Full-Field Optical Measurement[J];Chinese Journal of Semiconductors;2005-05
5 Zeng Fengzhang (School of Management and Economics, Beijing Institute of Technology, Beijing100081) Xu Xinle Wu Yuguang (Advanced Technology Generalization Institute of China North Industries Group, Beijing100081);Development of Technique of Multi Arc Ion Plating[J];JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY;1999-01
6 Dai Yao; Huang Jincai; Xu Binshi; HeJiawen;MOL Analysis of the Tensile Test[J];CHINA SURFACE ENGINEERIGN;1998-02
7 Xu Binshi;Expectation of Surface Engineering in the New Century[J];CHINA SURFACE ENGINEERIGN;2000-01
8 ZHU Xiao-dong,MI Yan-yu,HU Nai-sai,HE Jia-wen;Investigation into Evaluation of Interfacial Strength of Coatings[J];China Surface Engineering;2002-04
9 WANG Fei , XU Ke-wei (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Shanxi 710049, China);The Effects of Annealing on Creep Behavior of Copper Film During Nanoindentation[J];China Surface Engineering;2004-05
10 MA Feng, CAI Xun (Key Lab. of the Ministry of Education for High Temperature Materials and Testing, Shanghai Jiaotong Univ.,Shanghai 200030, China);Characterization and Evaluation of the Interfacial Bond Strength Between Coating and Substrate[J];Surface Technology;2001-05
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 WANG Hong-ge et al (Henan University of Science and Technology,Luoyang,Henan 471003);Optimization on Parameters of Fixed Cam of Plastic Film Residue Collector[J];Journal of Anhui Agricultural Sciences;2009-09
2 Chen Bo,Li Fuguo,He Min(Northwestern Polytechnical University,Xi'an 710072,China);Experimental Characterization of Damage Variables of Ductile Metal[J];Rare Metal Materials and Engineering;2011-11
3 CAO Si-lin,WANG Xu-jian,SHEN Cong-ju,LU Bin (Agricultural Machinery Institute,Xinjiang Academy of Land Reclamation Sciences,Xinjiang Shihezi,832000,China);Patent Analysis on Mechanization Technology of Retrieving the Used Plastic Film[J];Chinese Agricultural Mechanization;2009-04
4 XIE Jian-hua1,2,HOU Shu-lin1,LIU Ying-chao1,3(1.College of Engineering,China Agricultural University,Beijing,100083,China)2.College of Mechanical and Traffic,Xinjiang Agricultural University,Urumqi,830052,China;3.Beijing Vocational College of Agriculture,Beijing,102208,China);Research Status and Trends of Plastic Film Residue Collectors[J];Chinese Agricultural Mechanization;2012-05
5 DONG Meiling;JIN Guo;WANG Haidou;ZHU Lina;LIU Jinna;College of Materials Science and Chemical Engineering,Harbin Engineering University;National Key Laboratory for Remanufacturing,Academy of Armored Forces Engineering;School of Engineering and Technology,China University of Geosciences;;The Research Status of Nanoindetation Methods for Measuring Residual Stresses[J];Materials Review;2014-03
6 Huiling Jia;Mei Li;Zhaoxi Li;Xuejie Liu;College of Materials Science and Engineering,Beijing University of Chemical Technology;Institute of Mechanical Engineering,Inner Mongolia University of Sciences and Technology;School of Material and Metallurgy,Inner Mongolia University of Sciences and Technology;;MOLECULAR DYNAMICS STUDY ON DEFORMATION MECHANISM AND MECHANICAL PROPERTIES OF TIN NANOROD UNDER AXIAL TENSILE[J];Chinese Journal of Solid Mechanics;2014-06
7 Wang Qingjie,He Jin,Li Hongwen,Lu Caiyun,Rabi G.Rasaily,Su Yanbo(College of Engineering,China Agricultural University,Beijing 100083,China);Design and experiment on furrowing and anti-blocking unit for no-till planter[J];Transactions of the Chinese Society of Agricultural Engineering;2012-01
8 Chen Fa~1 Shi Jianxin~2 Zhao Haijun~2 Wang Xuenong~1 (1.Xinjiang Academy of Agricultural Sciences 2.Xinjiang Agricultural University);Optimum Design of Fixing Cam Combination Mechanism for Collecting Plastic Residue[J];Transactions of The Chinese Society of Agricultural Machinery;2005-12
9 Li Bin, Wang Jikui , Hu Kai, Jiang Bei (College of Mechanical and Electrical Engineering, Shihezi University, Shihezi 832003, China);Analysis and test of forward film removing mechanism for polythene film collector[J];Transactions of the Chinese Society of Agricultural Engineering;2012-21
10 Hu Kai;Wang Jikui;Li Bin;Jiang Bei;Ding Shuangshuang;Li Tianwen;College of Mechanical and Electrical Engineering,Shihezi University;;Development and experiment of combined operation machine for cotton straw chopping and plastic film collecting[J];Transactions of the Chinese Society of Agricultural Engineering;2013-19
China Proceedings of conference Full-text Database 2 Hits
1 HUANG Chunjie1,LI Wenya1,YU Min1,2,LIAO Hanlin2 (1 State Key Laboratory of Solidification Processing,Shaanxi Key Laboratory of Friction Welding Technologies, Northwestern Polytechnical University,Xi'an,Shaanxi,China,710072;2 LERMPS,Universite de Technologie de Belfort-Montbeliard Site de Sevenans,France);Investigation on Mechanical Properties of Heat Treated Copper Particles and Cold Sprayed Copper Coating by Micro-Indentation Test[A];[C];2013
2 Chunjie HUANG;Wenya LI;Min YU;Hanlin LIAO;State Key Laboratory of Solidification Processing, Shaanxi Key Laboratory of Friction Welding Technologies, Northwestern Polytechnical University;LERMPS, Université de Technologie de Belfort-Montbéliard,Site de Sévenans, France;;Hardness testing on cold sprayed Cu coating by indentation method[A];[C];2012
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved