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《Microelectronics》 2008-01
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Important Function of SiGe Semiconductor in Technology Development of Microelectronics

XIE Meng-xian1,GU Ni-na2 (1.School of Microelectronics and Solid State Electronics,Univ.Elec.Sci.and Technol.of China,Chengdu 610054,P.R.China;2.Product Design Service Center,TSMC(Shanghai)Company Limited,Shanghai 201616,P.R.China)  
Compared with Si-BJT and Si-FET(IC's),SiGe-HBT and SiGe-FET(IC's) have excellent characteristics in frequency and speed improvement.Important function of SiGe semiconductor in technology development of Si-based microelectronis is reviewed.The important role of strain engineering(i.e.carrier mobility enhancement by using strain) is emphasized specifically.Moreover,the current development of SiGe devices and ICs is discussed.
【CateGory Index】: TN304
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