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《Microelectronics》 2016-01
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Concept and Architecture Technology of Integrated Microsystems

DAI Gang;ZHANG Jian;Institute of Electronic Engineering,China Academy of Engineering Physics;  
The development of concept of integrated microsystems was introduced.The importance of integrated microsystems as "more than moore"was analyzed.The improvements of typical applications using integrated microsystem technology in scaling,miniature and spectral exploitation were summarized.Recent progress of the architecture technology,including 3D integration,transistor-scale heterogeneous integration of integrated microsystems was illustrated. A brief introduction of high-voltage,high-frequency,opto-electro-mechanical integration microsystems technology focused on improvement of special complex systems was given.
【Fund】: 中国工程物理研究院发展基金重点项目(2014A05011)
【CateGory Index】: TN401
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