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《Journal of Qufu Normal University(Natural Science)》 2010-04
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Influence of Deposition Rates on Hafnium Dioxide Film Stress and Optical Properties

QI Rui-yun,WU Fu-quan,HAO Dian-zhong,WANG Qing,WU Wen-di(Shandong Provincial Key Laboratory of Laser Polarization and Information Technology,Laser Institute,Qufu Normal University,273165,Shandong,Qufu,PRC)  
Using electron beam evaporation fabricated HfO2 films,the selected deposition rates were 3.3/s,5.5/s and 9.6/s,respectively.We tested the samples with ZGYO interferometer,UV3101-PC spectrophoto-meter,D/Max-ⅢA-type X-ray diffraction instrument and JSM-6700F cold field emission scanning electron microscopy.The experimental results show that the HfO2 films are all amorphous structure under our selected conditions.The residual stress and intrinsic stress of the HfO2 have the same trend,rised with the increasing of deposition rate firstly,and then decreased,At the deposition rate of 3.3/s,it has the minimum stress.The refractive index of HfO2 film fabricated under different deposition rates are all normal dispersion.The HfO2 film fabricated at 3.3/s has minimum dispersion and fine flatness.These results can provide references for making high-quality HfO2 films.
【CateGory Index】: O484.41
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Chinese Journal Full-text Database 6 Hits
1 HAO Dian-zhong, WANG Qing, SONG Lian-ke (Shandong Provincial Key Laboratory of Laser Polarization and Information Technology,and Laser Institute ,Qufu Normal University,Qufu 273165,China);Influence of oxygen partial pressure on residual stresses of TiO_2 films prepared by electron beam evaporation[J];Journal of Optoelectronics.Laser;2009-05
2 PAN Yong-qiang1,2, WU Zhen-sen2,HANG Ling-xia1, MU Ya-yong1 (1. School of Photoelectric Engineering, Xi′an Technological University, Xi′an 710032, China; 2. School of Science, Xidian University, Xi′an 710071, China);Interface roughness of multilayer dielectric optical thin film[J];Infrared and Laser Engineering;2009-03
3 SHAO Shuying FAN Zhengxiu FAN Ruiying SHAO Jianda (Research & Development Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Science, Shanghai 201800);A Review of Study of Stress in Thin Films[J];Laser & Optronics Progress;2005-01
4 LIU Wen-qiang1,LIU Dian-kui2 (1.Heilongjiang College of Construction Vocational and Technical,Harbin Heilongjiang 150025,China;2.Heilongjiang Agricultural Cultivation Construction Road and Bridge Co.,Ltd,Harbin Heilongjiang 150080,China);Analysis of Thermo-elasticity and Thermal Dynamic Properties of Cubic Hafnium Dioxide at High Pressure and High Temperature[J];Forestry Machinery & Woodworking Equipment;2010-01
5 HAO Dian-zhong,SU Fu-fang,WANG Zhao-bing (Institute of Laser Research,Qufu Normal University,273165,Qufu,Shandong,PRC);Development of 400-1100 nm Antireflection Film Based on Glan-Taylor Prism[J];Journal of Qufu Normal University(Natural Science);2009-01
6 HAO Dian-zhong,WANG Qing,XIA Yun-jie,WU Fu-quan,SONG Lian-ke(Shandong Provincial Key Laboratory of Laser Polarization and Information Technology,and Laser Institute ,Qufu Normal University,273165,Qufu,Shandong,PRC);Cant Anti-reflecting Film Design of Air Gap Type Glan-Taylor Prism[J];Journal of Qufu Normal University(Natural Science);2009-04
Chinese Journal Full-text Database 10 Hits
1 YE Lin-feng1,ZHU Yu-tao1,ZHANG Xi-yan1,2 ,3 ,LI Cong2 ,3,ZHANG Qiang3,LIU Nian-fu1, SHI Ming-hua1,QIU Shao-yu2,ZHANG Peng-cheng4,WEI Yi-ming1 (1. School of Physical Science and Engineering Technology, Guangxi University, Nanning 530004, China;2. School of Materials Science & Engineering, Chongqing University, Chongqing 400044, China;3.National Key Laboratory for Nuclear Fuels and Materials, Nuclear Power Institute of China (NPIC), Chengdu 610041, China; 4.National Key Laboratory for Surface Physics and Chemistry, Mianyang 621000,China);Research on stress-strain of oxide films of nanocrystalline Zircaloy-4[J];Ordnance Material Science and Engineering;2008-03
2 ZOU Chun-mei,ZUO Chang-ming,LU Sheng-bo,CUI Xu-mei,JI Hong(University of Electronic Science and Technology of China,Key Laboratory of Electronic Thin Films and ntegrated Devices of China,Chengdu 610054,China);Effect of the thickness of YBCO film on microstructure and critical current density[J];Journal of Functional Materials and Devices;2007-04
3 XU Jian-ming,XIONG Bing,YUAN He,SUN Chang-zheng,LUO Yi (Tsinghua National Laboratory for Information Science and Technology,State Key Laboratory on Integrated Optoelectronics,Department of Electronic Engineering,Tsinghua University,Beijing 100084,China);A novel non-situ thickness control method for a single anti-reflection coating thin film based on reflection spectrum analysis[J];Journal of Optoelectronics.Laser;2010-10
4 ZOU Wei-wei,WANG Yu-xia,XU Yang,ZHANG Xiu(State Key Lab on High Power Semiconductor Lasers,Changchun University of Science and Technology,Changchun 130022,China);Simulation of Thermal Stress in AlN Thin Film[J];OME Information;2011-01
5 ZHANG Yi-zhong,WU Zhi-ming,XU Xiang-dong,ZHOU Ying,JIANG Ya-dong (State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu Sichuan 610054, China);Deformation Analysis of Bolometer Micro-bridges[J];Infrared Technology;2008-09
6 SUN Rong-ge,YI Kui,FAN Zheng-xiu(R&D Center for Optical Thin Film Coatings,Shanghai Institute of Optics andFine Mechanics,The Chinese Academy of Sciences,Shanghai 201800,China);Finite Element Analysis for Substrate′s Initial Stress in Vacuum Deposition[J];Chinese Journal of Lasers;2006-07
7 Xu Peng Zhang Meng(1.Analyze and Test Center of Nanchang University; 2.Material Science and Technology Department of Nanchang University, Nanchang 330047);Current Status of Research on Measurement of the Stress in Thin Film[J];Science Mosaic;2006-12
8 SHE Hui1,2,WANG Biao3(1.School of Engineering Sun Yat-Sen University,Guangzhou 510275,China)(2.Guangdong Provincial Academy of Building Research,Guangzhou 510500,China)(3.School of Physics and Engineering Sun Yat-Sen University,Guangzhou 510275,China);Size-dependent Elastic Properties of Nano-film and its Residual Stresses[J];Nanoscience & Nanotechnology;2008-03
9 LIANG Ge~1,ZHANG Ya-juan~1,LIN Min~2(1.College of Materials Science and Engineering,Xi'an University of Technology, Xi'an 710048,China;2.State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University,Xi'an 710049,China);Fatigue properties of LD10 aluminium alloy with micro-arc oxidation coatings[J];Transactions of Materials and Heat Treatment;2010-02
10 Pan Yongqiang~(1,2) Hang Lingxia~1 Wu Zhensen~2 Wang Haohao~1 (1 School of Photoelectric Engineering,Xi'an Technological University,Xi'an,Shaanxi 710032,China 2 School of Science,Xidian University,Xi'an,Shaanxi 710071,China;Influence of Ion Beam Post-Treatment on Surface Roughness of TiO_2 Thin Films[J];Chinese Journal of Lasers;2010-04
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Shao Shuying Fan Zhengxiu Fan Ruiying Shao Jianda (Research & Development Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Science, Shanghai 201800) (Received 3 January 2003; revised 13 May 2003);Study of Residual Stress in ZrO_2 Thin Films[J];Acta Optica Sinica;2004-04
2 Feng Liping Liu Zhengtang Xu Bing(State Key Laboratory of Solidification Processing,College of Materials Science and Engineering,Northwestern Polytechnical University,Xi'an,Shaanxi 710072,China);First-Principles Calculations of Electronic Structure and Optical Properties of c-HfO_2[J];Acta Optica Sinica;2008-11
3 FAN Rui ying, FAN Zheng xiu (Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China);Stress analysis of thin films and some testing results[J];Optical Instruments;2001-Z1
4 Zhao Pei~ 1 ,Wu Fuquan~ 1,* ,Hao Dianzhong~1,Wang Reng~2,Ren Shufeng~1 1 Institute of Laser Research,Qufu Normal University,Qufu 273165 2 Depatrment of Physics, Qufu Normal University,Qufu 273165) Zhao Pei was born in Tengzhou in Sep.,1977.He is a graduate student in Laser Research Insitute of Qufu Normal University. His major is optical thin-film.;The Development of the Glan-Taylor Prism AR Film[J];Acta Photonica Sinica;2006-05
5 HUANG Guang-wei,TIAN Wei-jian,BU Jiang-ping(Xi′an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences,Xi′an 710068,China);New Design of Super Wide Bandwidth Antireflection Film[J];Acta Photonica Sinica;2007-09
6 LI Cun-xia,WANG Zhan-shan,WANG Feng-li,ZHU Jing-tao,WU Yong-rong,WANG Hong-chang, CHENG Xin-bin,CHEN Ling-yan(Institute of Precision Optical Engineering,Tongji University,Shanghai 200092,China);Design and Fabrication of High Reflection Multilayer for the Wavelength Range 50~110 nm[J];Acta Photonica Sinica;2007-10
7 HAO Dian-zhong,SU Fu-fang,SONG Lian-ke,WU Fu-quan,LI Guo-hua(Institute of Laser Research,Qufu Normal University,Qufu,Shandong 273165,China);Development of Antireflection Thin Films Based on Glan-Taylor Prism in Visible Spectrum and 1064 nm[J];Acta Photonica Sinica;2009-02
8 HAO Dian-zhong~,WU Fu-quan,SONG Lian-ke,MA Li-li, ZHANG Xu,YAN Bin(Institute of Laser Research,Qufu Normal University,Qufu 273165,China);Design and Test of Broad-band Antireflection Thin Films Based on Wollaston Prism[J];Journal of Optoelectronics.laser;2006-10
9 HAO Dian-zhong,WU Fu-quan,WANG Zhao-bing,SONG Lian-ke,LIU Tao,LI Guo-hua(Institute of Laser Research,Qufu Normal University,Qufu 273165,China);Development of antireflection thin films based on wollaston prism in hole visible spectrum[J];Journal of Optoelectronics.Laser;2008-08
10 CHEN Shu-yan1,2,QI Li-hong,CHEN Bo(1.Changchun Institute of Optics,Fine Mechanics and Physics,Changchun 130033,China; 2.Graduate University of Chinese Academy of Sciences,Beijing 100039,China);Measurement and analysis of surface profiles by optical scattering method[J];Infrared and Laser Engineering;2006-01
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