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Study of Plane-view TEM Samples of Diamond Films

Hu Jinsheng Lu Hongxiu Zhu Jing(Central Iron and Steel Research Institute, Beijing, 100081)Ning Xaoguang Yie Hengqang(Institute of Metal Research, Academia Sinica. Shenyang, 110015)Qi Lichang Yang Peichun Xuan Zhenwu Pn Xin Hou Li(Research Institute of Synthetic Crystals, Beijing, 100018)  
Microstructure and growth mode of diamond films by electron assisted CVD method have been studied by means of transmission electron microscopy. The results showed that grain size in diamond film, defect and the film growth mode are different to diamond films appearing different colour. There exists two typical microstructure in crystals of different diamond films,one is mainly five-fold twins, the other is mainly dislocation and micro twins coexisting.
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